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Zetterling, Carl-MikaelORCID iD iconorcid.org/0000-0001-8108-2631
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Publications (10 of 240) Show all publications
Chu, R., Chen, K., Zetterling, C.-M. & Schrimpf, R. (2025). (Ultra)wide-bandgap semiconductors for extreme environment electronics. Applied Physics Letters, 126(12), Article ID 120401.
Open this publication in new window or tab >>(Ultra)wide-bandgap semiconductors for extreme environment electronics
2025 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 126, no 12, article id 120401Article in journal, Editorial material (Refereed) Published
Place, publisher, year, edition, pages
AIP Publishing, 2025
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-362209 (URN)10.1063/5.0266356 (DOI)001456419600003 ()2-s2.0-105001520696 (Scopus ID)
Note

QC 20250415

Available from: 2025-04-09 Created: 2025-04-09 Last updated: 2025-04-15Bibliographically approved
Metreveli, A., Van Cuong, V., Kuroki, S. I., Tanaka, K. & Zetterling, C.-M. (2024). Impact of interface oxide type on the gamma radiation response of sic ttl ics. Facta Universitatis Series: Electronics and Energetics, 37(4), 599-607
Open this publication in new window or tab >>Impact of interface oxide type on the gamma radiation response of sic ttl ics
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2024 (English)In: Facta Universitatis Series: Electronics and Energetics, ISSN 0353-3670, E-ISSN 2217-5997, Vol. 37, no 4, p. 599-607Article in journal (Refereed) Published
Abstract [en]

In this study, we investigate the impact of Gamma Radiation on 4H Silicon Carbide (SiC) Transistor-Transistor Logic (TTL) integrated circuits (ICs), particularly focusing on inverters processed with distinct types of interface oxides: Thermally Grown, Chemical Vapor Deposition, and Atomic Layer Deposition. This research was conducted using a60Co source at Hiroshima University, applying varied radiation doses (17.9 rad(Si)/s, 7.3 rad(Si)/s, and 2.47 rad(Si)/s) to assess the resilience of the SiC inverters under these conditions. Our findings reveal that thermal oxides (Batch 1: W1 and W2) demonstrate higher radiation resilience compared to ALD and CVD interface oxides (Batch 2: W3 and W4), attributable to their denser structure and fewer defects. The study also identifies that while the inverters exhibit marginal degradation at gamma doses nearing 700 krad (under 6%), the most critical operational state is the passive mode (VCC = VIN = 0 V), where the build-up of induced charge in the oxide and interface may lead to early IC degradation of the noise margins. The outcomes from this research provide insights into the processing flow and enhancement of SiC electronics. Our results underscore the potential of SiC-based ICs in environments with high radiation levels, such as space missions, nuclear reactors, and medical applications, due to their enhanced radiation tolerance.

Place, publisher, year, edition, pages
National Library of Serbia, 2024
Keywords
BJT, Co-60, ELDRS, gamma radiation, ICs, Inverter, Logic Device, Processing, Silicon Carbide, TTL
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-358278 (URN)10.2298/FUEE2404599M (DOI)001382894500004 ()2-s2.0-85213472010 (Scopus ID)
Note

QC 20250204

Available from: 2025-01-08 Created: 2025-01-08 Last updated: 2025-02-04Bibliographically approved
Batista, G., Zetterling, C.-M., Öberg, J. & Saotome, O. (2024). SHM System for Composite Material Based on Lamb Waves and Using Machine Learning on Hardware. Sensors, 24(23), Article ID 7817.
Open this publication in new window or tab >>SHM System for Composite Material Based on Lamb Waves and Using Machine Learning on Hardware
2024 (English)In: Sensors, E-ISSN 1424-8220, Vol. 24, no 23, article id 7817Article in journal (Refereed) Published
Abstract [en]

There is extensive use of nondestructive test (NDT) inspections on aircraft, and many techniques nowadays exist to inspect failures and cracks in their structures. Moreover, NDT inspections are part of a more general structural health monitoring (SHM) system, where cutting-edge technologies are needed as powerful resources to achieve high performance. The high-performance aspects of SHM systems are response time, power consumption, and usability, which are difficult to achieve because of the system's complexity. Then, it is even more challenging to develop a real-time low-power SHM system. Today, the ideal process is for structural health information extraction to be completed on the flight; however, the defects and damage are quantitatively made offline and on the ground, and sometimes, the respective procedure test is applied later on the ground, after the flight. For this reason, the present paper introduces an FPGA-based intelligent SHM system that processes Lamb wave signals using piezoelectric sensors to detect, classify, and locate damage in composite structures. The system employs machine learning (ML), specifically support vector machines (SVM), to classify damage while addressing outlier challenges with the Mahalanobis distance during the classification phase. To process the complex Lamb wave signals, the system incorporates well-known signal processing (DSP) techniques, including power spectrum density (PSD), wavelet transform, and Principal Component Analysis (PCA), for noise reduction, feature extraction, and data compression. These techniques enable the system to handle material anisotropy and mitigate the effects of edge reflections and mode conversions. Damage is quantitatively evaluated with classification accuracies of 96.25% for internal defects and 97.5% for external defects, with localization achieved by associating receiver positions with damage occurrence. This robust system is validated through experiments and demonstrates its potential for real-time applications in aerospace composite structures, addressing challenges related to material complexity, outliers, and scalable hardware implementation for larger sensor networks.

Place, publisher, year, edition, pages
MDPI AG, 2024
Keywords
structural health monitoring, machine learning, composite material, outlier solution, hardware implementation
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-358627 (URN)10.3390/s24237817 (DOI)001378180700001 ()39686354 (PubMedID)2-s2.0-85211806501 (Scopus ID)
Note

QC 20250120

Available from: 2025-01-20 Created: 2025-01-20 Last updated: 2025-01-20Bibliographically approved
Metreveli, A., Hallén, A., Di Sarcina, I., Cemmi, A., Verna, A. & Zetterling, C.-M. (2024). The Impact of Gamma Irradiation on 4H-SiC Bipolar Junction Inverters under Various Biasing Conditions. In: Solid State Phenomena: (pp. 71-76). Trans Tech Publications Ltd, 361
Open this publication in new window or tab >>The Impact of Gamma Irradiation on 4H-SiC Bipolar Junction Inverters under Various Biasing Conditions
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2024 (English)In: Solid State Phenomena, Trans Tech Publications Ltd , 2024, Vol. 361, p. 71-76Chapter in book (Refereed)
Abstract [en]

In this study, we introduce the impact of gamma irradiation on 4H-SiC based transistor-transistor logic (TTL) inverters. These monolithic bipolar inverters have been successfully demonstrated in a broad spectrum of temperature and supply voltage conditions. In this iteration of experiments, attempts made to the processing to increase beta values. The gamma radiation tests from a60 Co source were conducted under various operation conditions and measured in-situ under different biasing conditions. The Silicon Carbide Integrated circuits ( SiC ICs) show excellent tolerance properties to gamma radiation up to doses of nearly 1 MRad. Comparable Si BJT-based TTL inverters show considerable degradation already at one order of magnitude lower doses, clearly demonstrating the superior radiation hardness of 4H-SiC ICs.

Place, publisher, year, edition, pages
Trans Tech Publications Ltd, 2024
Keywords
Bipolar Transistor, Co-60, Critical Regime, Enhanced Dose-Rate Sensitivity, Gamma Radiation, Inverter, TTL
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-354318 (URN)10.4028/p-O7afLP (DOI)2-s2.0-85204895292 (Scopus ID)
Note

QC 20241003

Available from: 2024-10-02 Created: 2024-10-02 Last updated: 2024-10-03Bibliographically approved
Metreveli, A., Hallén, A., Di Sarcina, I., Cemmi, A., Scifo, J., Verna, A. & Zetterling, C.-M. (2023). In Situ Gamma Irradiation Effects on 4H-SiC Bipolar Junction Transistors. IEEE Transactions on Nuclear Science, 70(12), 2597-2604
Open this publication in new window or tab >>In Situ Gamma Irradiation Effects on 4H-SiC Bipolar Junction Transistors
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2023 (English)In: IEEE Transactions on Nuclear Science, ISSN 0018-9499, E-ISSN 1558-1578, Vol. 70, no 12, p. 2597-2604Article in journal (Refereed) Published
Abstract [en]

Gamma irradiation effects have been investigated on 4H-silicon carbide (SiC) bipolar junction transistors (BJTs), where the devices were exposed under different biasing regimes such as saturation, cut-off, active, reverse, and zero bias. Since bipolar transistors can be affected by dose rate, three different dose rates were used during irradiation tests. Characterization was performed on the transistors, without irradiation but in situ to avoid delays between irradiation and characterization. The study explores the relationship between biasing conditions and their impact on radiation-induced degradation of SiC BJT transistors. From these experiments, it is clear that 4H-SiC bipolar transistors can withstand high gamma doses, in the worst case less than 22% degradation of the current gain was seen for doses of up to 2 Mrad(Si).

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2023
Keywords
Bipolar transistor, Co-60, critical regime, enhanced dose-rate sensitivity, gamma radiation, silicon carbide (SiC)
National Category
Pharmacology and Toxicology
Identifiers
urn:nbn:se:kth:diva-342962 (URN)10.1109/TNS.2023.3326608 (DOI)001130795000011 ()2-s2.0-85176312997 (Scopus ID)
Note

QC 20240201

Available from: 2024-02-01 Created: 2024-02-01 Last updated: 2024-02-01Bibliographically approved
Ekström, M. & Zetterling, C.-M. (2023). Self-aligned contacts to ion implanted S/D regions in 4H-SiC. Materials Science in Semiconductor Processing, 168, Article ID 107849.
Open this publication in new window or tab >>Self-aligned contacts to ion implanted S/D regions in 4H-SiC
2023 (English)In: Materials Science in Semiconductor Processing, ISSN 1369-8001, E-ISSN 1873-4081, Vol. 168, article id 107849Article in journal (Refereed) Published
Abstract [en]

The self-aligned silicide (salicide) process, where a metallic silicide is formed without lithographic definition to both source/drain-regions and the gate, is important for devices thanks to its ability to minimize parasitic resistances in scaled silicon CMOS technology. The challenge to transfer the process to SiC technology is two-fold: a single silicide has to give low resistance contacts to both ion implanted p-type and n-type simultaneously, and the typical temperatures required to form contacts to SiC is high enough that silicide agglomerates on polysilicon. In this work, we investigated if there exists a process window for salicide process for the purpose of developing a salicide process for SiC CMOS. Transfer length method structures were fabricated by ion implantation of phosphorus and aluminum to investigate simultaneous contacts to SiC. Bridge resistor structures (2μm width) were fabricated both with and without silicide-block to determine the silicide stability on highly in-situ doped polysilicon. The approach is design of experiment with multiple factors, including silicide composition, annealing temperature, deposited metal thickness and annealing time. The formation of self-aligned low resistive contacts to both n-type and p-type SiC was successful. The mutual process window for the co-existence of stable silicide on polysilicon and low resistive contacts to SiC, which is required for true salicide process, could not be found.

Place, publisher, year, edition, pages
Elsevier Ltd, 2023
Keywords
Ion implantation, Salicide, SiC, Simultaneous contacts
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Materials Engineering
Identifiers
urn:nbn:se:kth:diva-338074 (URN)10.1016/j.mssp.2023.107849 (DOI)001086744000001 ()2-s2.0-85172698884 (Scopus ID)
Note

QC 20231013

Available from: 2023-10-13 Created: 2023-10-13 Last updated: 2023-11-15Bibliographically approved
Hou, S., Shakir, M., Hellström, P.-E., Malm, B. G., Zetterling, C.-M. & Östling, M. (2020). A Silicon Carbide 256 Pixel UV Image Sensor Array Operating at 400 degrees C. IEEE Journal of the Electron Devices Society, 8(1), 116-121
Open this publication in new window or tab >>A Silicon Carbide 256 Pixel UV Image Sensor Array Operating at 400 degrees C
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2020 (English)In: IEEE Journal of the Electron Devices Society, E-ISSN 2168-6734, Vol. 8, no 1, p. 116-121Article in journal (Refereed) Published
Abstract [en]

An image sensor based on wide band gap silicon carbide (SiC) has the merits of high temperature operation and ultraviolet (UV) detection. To realize a SiC-based image sensor the challenge of opto-electronic on-chip integration of SiC photodetectors and digital electronic circuits must be addressed. Here, we demonstrate a novel SiC image sensor based on our in-house bipolar technology. The sensing part has 256 ( $16\times 16$ ) pixels. The digital circuit part for row and column selection contains two 4-to-16 decoders and one 8-bit counter. The digital circuits are designed in transistor-transistor logic (TTL). The entire circuit has 1959 transistors. It is the first demonstration of SiC opto-electronic on-chip integration. The function of the image sensor up to 400 degrees C has been verified by taking photos of the spatial patterns masked from UV light. The image sensor would play a significant role in UV photography, which has important applications in astronomy, clinics, combustion detection and art.

Place, publisher, year, edition, pages
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2020
Keywords
Silicon carbide (SiC), image sensor, ultraviolet (UV), photodiode, high temperature, bipolar junction transistor (BJT), transistor-transistor logic (TTL)
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-270881 (URN)10.1109/JEDS.2020.2966680 (DOI)000515658000001 ()2-s2.0-85079349461 (Scopus ID)
Note

QC 20200325

Available from: 2020-03-25 Created: 2020-03-25 Last updated: 2023-02-06Bibliographically approved
Mukherjee, D., Oliveira, F., Trippe, S. C., Rotter, S., Neto, M., Silva, R., . . . Mendes, J. C. (2020). Deposition of diamond films on single crystalline silicon carbide substrates. Diamond and related materials, 101, Article ID 107625.
Open this publication in new window or tab >>Deposition of diamond films on single crystalline silicon carbide substrates
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2020 (English)In: Diamond and related materials, ISSN 0925-9635, E-ISSN 1879-0062, Vol. 101, article id 107625Article in journal (Refereed) Published
Abstract [en]

Silicon carbide (SiC) is a wide band gap material that is slowly but steadily asserting itself as a reliable alternative to silicon (Si) for high temperature electronics applications, in particular for the electrical vehicles industry. The passivation of SiC devices with diamond films is expected to decrease leakage currents and avoid premature breakdown of the devices, leading to more efficient devices. However, for an efficient passivation the interface between both materials needs to be virtually void free and high quality diamond films are required from the first stages of growth. In order to evaluate the impact of the deposition and seeding parameters in the properties of the deposits, diamond films were deposited on SiC substrates by hot filament chemical vapor deposition (HFCVD). Before the seeding step the substrates were exposed to diamond growth conditions (pretreatment PT) and seeding was performed with a solution of detonation nanodiamond (DND) particles and with 6-12 and 40-60 mu m grit. Diamond films were then grown at different temperatures and with different methane concentrations and the deposits were observed in a scanning electron microscope (SEM); their quality was assessed with Raman spectroscopy.

Place, publisher, year, edition, pages
Elsevier, 2020
Keywords
DND seeding, CVD diamond, Device passivation, SiC
National Category
Physical Sciences
Identifiers
urn:nbn:se:kth:diva-268808 (URN)10.1016/j.diamond.2019.107625 (DOI)000510954000026 ()2-s2.0-85075194247 (Scopus ID)
Note

QC 20200224

Available from: 2020-02-24 Created: 2020-02-24 Last updated: 2022-06-26Bibliographically approved
Ekström, M., Malm, B. G. & Zetterling, C.-M. (2020). Ultrafast Pulsed I-V and Charge Pumping Interface Characterization of Low Voltage n-Channel SiC MOSFETs. In: H. Yano, T. Ohshima, K. Eto, S. Harada, T. Mitani, Y. Tanaka (Ed.), Silicon Carbide and Related Materials 2019: . Paper presented at International Conference on Silicon Carbide and Related Materials 2019, Kyoto, Japan (pp. 642-651). Trans Tech Publications, Ltd., 1004
Open this publication in new window or tab >>Ultrafast Pulsed I-V and Charge Pumping Interface Characterization of Low Voltage n-Channel SiC MOSFETs
2020 (English)In: Silicon Carbide and Related Materials 2019 / [ed] H. Yano, T. Ohshima, K. Eto, S. Harada, T. Mitani, Y. Tanaka, Trans Tech Publications, Ltd. , 2020, Vol. 1004, p. 642-651Conference paper, Published paper (Refereed)
Abstract [en]

Control of defects at or near the MOS interface is paramount for device performance optimization. The SiC MOS system is known to exhibit two types of MOS defects,defects at the SiO2/SiC interface and defects inside of the gate oxide that can trap channel charge carriers. Differentiating these two types can be challenging. In this work, we use several electrical measurement techniques to extract and separate these two types of defects. The charge pumping method and the ultrafast pulsed I-V method are given focus, as they are independent methods for extracting the defects inside the gate oxide. Defects are extracted from low voltage n-channel MOSFETs with differently processed gate oxides: steam-treatment, dry oxidation and nitridation. Ultrafast pulsed I-V and charge pumping gives comparable results. The presented analysis of the electrical characterization methods is of use for SiC MOSFET process development.

Place, publisher, year, edition, pages
Trans Tech Publications, Ltd., 2020
Series
Material Science Forum, ISSN 1662-9752 ; 1004
Keywords
Charge pumping, charge trapping, interface state density, near-interface state density, ultrafast pulsed I-V
National Category
Other Engineering and Technologies
Identifiers
urn:nbn:se:kth:diva-278736 (URN)10.4028/www.scientific.net/MSF.1004.642 (DOI)2-s2.0-85089804164 (Scopus ID)
Conference
International Conference on Silicon Carbide and Related Materials 2019, Kyoto, Japan
Funder
Knut and Alice Wallenberg Foundation, Working on Venus
Note

Part of ISBN 9783035715798

QC 20240315

Available from: 2020-07-28 Created: 2020-07-28 Last updated: 2024-03-18Bibliographically approved
Inoue, J., Kuroki, S.-I. -., Ishikawa, S., Maeda, T., Sezaki, H., Makino, T., . . . Zetterling, C.-M. (2019). 4H-SIC trench pMOSFETs for high-frequency CMOS inverters. In: Silicon Carbide and Related Materials 2018: . Paper presented at 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018, 2-6 September 2018, Birmingham, United Kingdom (pp. 837-840). Trans Tech Publications Ltd
Open this publication in new window or tab >>4H-SIC trench pMOSFETs for high-frequency CMOS inverters
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2019 (English)In: Silicon Carbide and Related Materials 2018, Trans Tech Publications Ltd , 2019, p. 837-840Conference paper, Published paper (Refereed)
Abstract [en]

Low-parasitic-capacitance 4H-SiC pMOSFETs were demonstrated for high-frequency CMOS inverters. In these pMOSFETs, device characteristics including parasitic capacitances (gate-source, gate-drain capacitance) were investigated and low parasitic capacitance was achieved by the trench gate structure.

Place, publisher, year, edition, pages
Trans Tech Publications Ltd, 2019
Series
Materials Science Forum, ISSN 1662-9752 ; 963
Keywords
4H-SiC, Harsh environment electronics, Overlapping capacitance, PMOSFET, Capacitance, CMOS integrated circuits, MOSFET devices, Device characteristics, Gate-drain capacitance, Harsh environment, High frequency HF, Parasitic capacitance, Trench gate structures, Silicon carbide
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-262430 (URN)10.4028/www.scientific.net/MSF.963.837 (DOI)2-s2.0-85071890235 (Scopus ID)
Conference
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018, 2-6 September 2018, Birmingham, United Kingdom
Note

QC 20191104

Part of ISBN 9783035713329

Available from: 2019-11-04 Created: 2019-11-04 Last updated: 2024-10-28Bibliographically approved
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ORCID iD: ORCID iD iconorcid.org/0000-0001-8108-2631

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