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Publications (10 of 84) Show all publications
Ottonello Briano, F., Errando-Herranz, C., Rödjegård, H., Martin, H., Sohlström, H. & Gylfason, K. (2019). Carbon Dioxide Sensing with Low-confinement High-sensitivity Mid-IR Silicon Waveguides. In: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO): . Paper presented at Conference on Lasers and Electro-Optics (CLEO), MAY 05-10, 2019, San Jose, CA. IEEE
Open this publication in new window or tab >>Carbon Dioxide Sensing with Low-confinement High-sensitivity Mid-IR Silicon Waveguides
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2019 (English)In: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE , 2019Conference paper, Published paper (Refereed)
Abstract [en]

We present a low-confinement Si waveguide for 4.26 mu m wavelength and apply it to sense CO2 concentrations down to 0.1 %. We demonstrate the highest reported waveguide sensitivity to CO2. 44% of the free-space sensitivity.

Place, publisher, year, edition, pages
IEEE, 2019
Series
Conference on Lasers and Electro-Optics, ISSN 2160-9020
Keywords
mid-infrared, mid-IR, photonics, silicon photonics, gas sensing, optical sensing, optical gas sensing, absorption, carbon dioxide, CO2, CO2 sensing, trace gas, waveguide, photonic waveguide, silicon, microfabrication, microsystems, microtechnology, nanotechnology
National Category
Other Engineering and Technologies Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering Analytical Chemistry Atom and Molecular Physics and Optics
Identifiers
urn:nbn:se:kth:diva-259471 (URN)10.23919/CLEO.2019.8750210 (DOI)000482226302159 ()2-s2.0-85069147415 (Scopus ID)978-1-943580-57-6 (ISBN)
Conference
Conference on Lasers and Electro-Optics (CLEO), MAY 05-10, 2019, San Jose, CA
Note

QC 20190917

Available from: 2019-09-17 Created: 2019-09-17 Last updated: 2019-10-03
Quack, N., Sattari, H., Takabayashi, A. Y., Zhang, Y., Errando-Herranz, C., Edinger, P. & Gylfason, K. (2019). Exploiting Mechanics at the Micro- and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits. In: : . Paper presented at 2019 IEEE Photonics Society Summer Topical Meeting Series (SUM) (pp. 1-1).
Open this publication in new window or tab >>Exploiting Mechanics at the Micro- and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits
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2019 (English)Conference paper, Oral presentation with published abstract (Other academic)
Abstract [en]

We exploit Micro- & Nano-Electro-Mechanical Systems in Photonic Integrated Circuits to perform basic photonic operations, including phase shifting, attenuation and switching. Due to their small footprint and low insertion loss, Photonic MEMS are highly scalable, while mechanical latching mechanisms can offer zero steady state power consumption.

Keywords
silicon photonics, MEMS, reconfigurable photonics, integrated photonics
National Category
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-258913 (URN)10.1109/PHOSST.2019.8795036 (DOI)
Conference
2019 IEEE Photonics Society Summer Topical Meeting Series (SUM)
Projects
MORPHIC
Available from: 2019-09-11 Created: 2019-09-11 Last updated: 2019-09-11
Quack, N., Sattari, H., Takabayashi, A. Y., Zhang, Y., Edinger, P., Errando-Herranz, C., . . . Bogaerts, W. (2019). Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. In: : . Paper presented at 2019 Optical Fiber Communications Conference and Exhibition (OFC) (pp. 1-3).
Open this publication in new window or tab >>Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits
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2019 (English)Conference paper, Oral presentation with published abstract (Other academic)
Abstract [en]

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

Keywords
integrated optics, silicon photonics, MEMS, reconfigurable photonics
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Nano Technology
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-258915 (URN)978-1-943580-53-8 (ISBN)
Conference
2019 Optical Fiber Communications Conference and Exhibition (OFC)
Projects
MORPHIC
Available from: 2019-09-11 Created: 2019-09-11 Last updated: 2019-09-11
Edinger, P., Errando-Herranz, C. & Gylfason, K. (2019). Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics. In: : . Paper presented at The 32nd IEEE International Conference on Micro Electro Mechanical Systems.
Open this publication in new window or tab >>Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics
2019 (English)Conference paper, Poster (with or without abstract) (Refereed)
Abstract [en]

We experimentally demonstrate a silicon MEMS phase shifter achieving more than π phase shift with sub-dB insertion loss (IL).  The phase is tuned by reducing the gap between a static suspended waveguide and a free silicon beam, via comb-drive actuation.  Our device reaches 1.2π phase shift at only 20 V, with only 0.3 dB insertion loss – an order of magnitude improvement over previously reported MEMS devices.  The device has a small footprint of 50×70 µm2 and its power consumption is 5 orders of magnitude lower than that of traditional thermal phase shifters.  Our new phase shifter is a fundamental building block of the next-generation large scale reconfigurable photonic circuits which will find applications in datacenter interconnects, artificial intelligence (AI), and quantum computing.

Keywords
silicon photonics, reconfigurable photonics, photonic mems
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-246037 (URN)
Conference
The 32nd IEEE International Conference on Micro Electro Mechanical Systems
Projects
Morphic
Note

QC 20190312

Available from: 2019-03-11 Created: 2019-03-11 Last updated: 2019-03-12Bibliographically approved
Errando-Herranz, C., Le Thomas, N. & Gylfason, K. (2019). Low-power optical beam steering by microelectromechanical waveguide gratings. Optics Letters, 44(4), 855-858
Open this publication in new window or tab >>Low-power optical beam steering by microelectromechanical waveguide gratings
2019 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 44, no 4, p. 855-858Article in journal (Refereed) Published
Abstract [en]

Optical beam steering is key for optical communications, laser mapping (lidar), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower-cost, and more power-efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, to the best of our knowledge, beam steering by microelectromechanical (MEMS) actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6 degrees beam steering with 20 V actuation and power consumption below the mu W level, i.e., more than five orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.

Place, publisher, year, edition, pages
OPTICAL SOC AMER, 2019
National Category
Accelerator Physics and Instrumentation
Identifiers
urn:nbn:se:kth:diva-245134 (URN)10.1364/OL.44.000855 (DOI)000458786800034 ()30768004 (PubMedID)2-s2.0-85061536509 (Scopus ID)
Note

QC 20190313

Available from: 2019-03-13 Created: 2019-03-13 Last updated: 2019-03-18Bibliographically approved
Edinger, P., Errando-Herranz, C. & Gylfason, K. (2019). Reducing actuation nonlinearity of MEMS phase shifters for reconfigurable photonic circuits. In: : . Paper presented at CLEO 2019. Optical Society of America
Open this publication in new window or tab >>Reducing actuation nonlinearity of MEMS phase shifters for reconfigurable photonic circuits
2019 (English)Conference paper, Oral presentation with published abstract (Other academic)
Abstract [en]

The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements

Place, publisher, year, edition, pages
Optical Society of America, 2019
Keywords
silicon photonics, MEMS, reconfigurable photonics
National Category
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-258906 (URN)
Conference
CLEO 2019
Projects
MORPHIC
Available from: 2019-09-11 Created: 2019-09-11 Last updated: 2019-09-11
Edinger, P., Errando-Herranz, C. & Gylfason, K. (2019). Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits. In: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO): . Paper presented at Conference on Lasers and Electro-Optics (CLEO), MAY 05-10, 2019, San Jose, CA. IEEE
Open this publication in new window or tab >>Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits
2019 (English)In: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE , 2019Conference paper, Published paper (Refereed)
Abstract [en]

The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements.

Place, publisher, year, edition, pages
IEEE, 2019
Series
Conference on Lasers and Electro-Optics, ISSN 2160-9020
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-259470 (URN)10.23919/CLEO.2019.8749466 (DOI)000482226300325 ()2-s2.0-85069169657 (Scopus ID)978-1-943580-57-6 (ISBN)
Conference
Conference on Lasers and Electro-Optics (CLEO), MAY 05-10, 2019, San Jose, CA
Note

QC 20190918

Available from: 2019-09-18 Created: 2019-09-18 Last updated: 2019-09-18Bibliographically approved
Bleiker, S. J., Dubois, V. J., Schröder, S., Ottonello Briano, F., Gylfason, K. B., Stemme, G. & Niklaus, F. (2018). Adhesive Wafer Bonding for Heterogeneous System Integration. In: The Electrochemical Society (Ed.), ECS Meeting Abstracts: . Paper presented at Americas International Meeting on Electrochemistry and Solid State Science (AiMES 2018).
Open this publication in new window or tab >>Adhesive Wafer Bonding for Heterogeneous System Integration
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2018 (English)In: ECS Meeting Abstracts / [ed] The Electrochemical Society, 2018Conference paper, Oral presentation with published abstract (Refereed)
Keywords
Adhesive wafer bonding, Wafer bonding, Integration, Hetergeneous integration, MEMS, NEMS, CMOS
National Category
Manufacturing, Surface and Joining Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-253894 (URN)
Conference
Americas International Meeting on Electrochemistry and Solid State Science (AiMES 2018)
Note

QC 20190624

Available from: 2019-06-19 Created: 2019-06-19 Last updated: 2019-06-24Bibliographically approved
Quellmalz, A., Smith, A. D., Elgammal, K., Fan, X., Delin, A., Östling, M., . . . Niklaus, F. (2018). Influence of Humidity on Contact Resistance in Graphene Devices. ACS Applied Materials and Interfaces, 10(48), 41738-41746
Open this publication in new window or tab >>Influence of Humidity on Contact Resistance in Graphene Devices
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2018 (English)In: ACS Applied Materials and Interfaces, ISSN 1944-8244, E-ISSN 1944-8252, Vol. 10, no 48, p. 41738-41746Article in journal (Refereed) Published
Abstract [en]

The electrical contact resistance at metal–graphene interfaces can significantly degrade the properties of graphene devices and is currently hindering the full exploitation of graphene’s potential. Therefore, the influence of environmental factors, such as humidity, on the metal–graphene contact resistance is of interest for all graphene devices that operate without hermetic packaging. We experimentally studied the influence of humidity on bottom-contacted chemical-vapor-deposited (CVD) graphene–gold contacts, by extracting the contact resistance from transmission line model (TLM) test structures. Our results indicate that the contact resistance is not significantly affected by changes in relative humidity (RH). This behavior is in contrast to the measured humidity sensitivity  of graphene’s sheet resistance. In addition, we employ density functional theory (DFT) simulations to support our experimental observations. Our DFT simulation results demonstrate that the electronic structure of the graphene sheet on top of silica is much more sensitive to adsorbed water molecules than the charge density at the interface between gold and graphene. Thus, we predict no degradation of device performance by alterations in contact resistance when such contacts are exposed to humidity. This knowledge underlines that bottom-contacting of graphene is a viable approach for a variety of graphene devices and the back end of the line integration on top of conventional integrated circuits.

Place, publisher, year, edition, pages
American Chemical Society (ACS), 2018
Keywords
graphene, bottom-contact, contact resistance, humidity sensitivity, integration, sheet resistance
National Category
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-232554 (URN)10.1021/acsami.8b10033 (DOI)000452694100088 ()30387599 (PubMedID)2-s2.0-85057551886 (Scopus ID)
Funder
VINNOVA, 2016-01655 2017-05108Swedish Research Council, VR 2015-04608 VR 2016-05980Swedish Energy Agency, STEM P40147-1 STEM P40147-1EU, European Research Council, 277879 307311
Note

QC 20181207

Available from: 2018-07-25 Created: 2018-07-25 Last updated: 2019-01-08Bibliographically approved
Errando-Herranz, C., Edinger, P., Colangelo, M., Björk, J., Ahmed, S., Stemme, G., . . . Gylfason, K. B. (2018). New dynamic silicon photonic components enabled by MEMS technology. In: Proceedings Volume 10537, Silicon Photonics XIII: . Paper presented at Silicon Photonics XIII 2018, San Francisco, United States, 29 January 2018 through 1 February 2018. SPIE - International Society for Optical Engineering, 10537, Article ID 1053711.
Open this publication in new window or tab >>New dynamic silicon photonic components enabled by MEMS technology
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2018 (English)In: Proceedings Volume 10537, Silicon Photonics XIII, SPIE - International Society for Optical Engineering, 2018, Vol. 10537, article id 1053711Conference paper, Published paper (Refereed)
Abstract [en]

Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2018
Series
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X ; 10537
Keywords
MEMS, silicon photonics, tuning, ring resonator, waveguide dispersion, surface grating coupler
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-225106 (URN)10.1117/12.2297588 (DOI)000448020000015 ()2-s2.0-85047395610 (Scopus ID)9781510615595 (ISBN)
Conference
Silicon Photonics XIII 2018, San Francisco, United States, 29 January 2018 through 1 February 2018
Projects
VR-HETXMEMSM&M
Funder
Swedish Research Council, 621-2012-5364Swedish Research Council, B0460801EU, European Research Council, 277879EU, European Research Council, 267528
Note

QC 20180404

Available from: 2018-03-28 Created: 2018-03-28 Last updated: 2019-08-20Bibliographically approved
Organisations
Identifiers
ORCID iD: ORCID iD iconorcid.org/0000-0001-9008-8402

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