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Publications (10 of 14) Show all publications
Su, R., Kirillin, M., Ekberg, P. & Mattsson, L. (2015). Three-dimensional metrology of embedded microfeatures in ceramics by infrared optical coherence tomography – advantages and limitations. In: The Proceedings of the 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance: . Paper presented at the 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, March 17 - 18, 2015. European society for precision engineering & nanotechnology
Open this publication in new window or tab >>Three-dimensional metrology of embedded microfeatures in ceramics by infrared optical coherence tomography – advantages and limitations
2015 (English)In: The Proceedings of the 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, European society for precision engineering & nanotechnology , 2015Conference paper, Published paper (Refereed)
Abstract [en]

Advanced printing, structuring, and lamination technologies allow for large-scale and cost-effective manufacturing of multi-layered ceramic micro devices with complex three-dimensional (3D) structures. Infrared (IR) optical coherence tomography (OCT) is a promising technology for rapid, non-contact, high-resolution, and 3D inspection of the microchannels, metal prints, defects, and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometres beneath surfaces. In this study the recent progresses of OCT technology for ceramic materials are reviewed, and its advantages and limitations as a metrology tool are evaluated through experiments and Monte Carlo simulations. Several measurement errors of OCT are revealed and the measurement in lateral directions is significantly affected by scattering in the ceramics. Besides of that, two types of image artefacts are found to be present in OCT images due to multiple reflections between neighbouring boundaries and inhomogeneity of refractive index. A wavefront aberration exists in the OCT system with a scanning scheme of two galvo mirrors.

Place, publisher, year, edition, pages
European society for precision engineering & nanotechnology, 2015
National Category
Nano Technology
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-164317 (URN)2-s2.0-84947078815 (Scopus ID)
Conference
the 11th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, March 17 - 18, 2015
Funder
XPRES - Initiative for excellence in production research
Note

QC 20150512

Available from: 2015-04-15 Created: 2015-04-15 Last updated: 2016-03-14Bibliographically approved
Su, R., Ekberg, P., Leitner, M. & Mattsson, L. (2014). Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels. Journal of the Optical Society of America A, 31(12), 2551-2560
Open this publication in new window or tab >>Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels
2014 (English)In: Journal of the Optical Society of America A, ISSN 0740-3232, Vol. 31, no 12, p. 2551-2560Article in journal (Refereed) Published
Abstract [en]

Optical coherence tomography (OCT) has proven to be a useful tool for investigating internal structures in ceramic tapes, and the technique is expected to be important for roll-to-roll manufacturing. However, because of high scattering in ceramic materials, noise and speckles deteriorate the image quality, which makes automated quantitative measurements of internal interfaces difficult. To overcome this difficulty we present in this paper an innovative image analysis approach based on volumetric OCT data. The engine in the analysis is a 3D image processing and analysis algorithm. It is dedicated to boundary segmentation and dimensional measurement in volumetric OCT images, and offers high accuracy, efficiency, robustness, subpixel resolution, and a fully automated operation. The method relies on the correlation property of a physical interface and effectively eliminates pixels caused by noise and speckles. The remaining pixels being stored are the ones confirmed to be related to the target interfaces. Segmentation of tilted and curved internal interfaces separated by similar to 10 mu m in the Z direction is demonstrated. The algorithm also extracts full-field top-view intensity maps of the target interfaces for high-accuracy measurements in the X and Y directions. The methodology developed here may also be adopted in other similar 3D imaging and measurement technologies, e.g., ultrasound imaging, and for various materials.

Place, publisher, year, edition, pages
Optical Society of America, 2014
Keywords
Three-dimensional image processing, Tomographic image processing, Noise in imaging systems, Optical coherence tomography, Optical inspection, Industrial optical metrology
National Category
Other Physics Topics
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-155763 (URN)10.1364/JOSAA.31.002551 (DOI)000345902400007 ()2-s2.0-84942372053 (Scopus ID)
Funder
XPRES - Initiative for excellence in production research
Note

QC 20141119

Available from: 2014-11-12 Created: 2014-11-12 Last updated: 2017-12-05Bibliographically approved
Ekberg, P., Su, R., Chang, E. W., Yun, S. H. & Mattsson, L. (2014). Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data. Optical Society of America. Journal A: Optics, Image Science, and Vision, 31(2), 217-226
Open this publication in new window or tab >>Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data
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2014 (English)In: Optical Society of America. Journal A: Optics, Image Science, and Vision, ISSN 1084-7529, E-ISSN 1520-8532, Vol. 31, no 2, p. 217-226Article in journal (Refereed) Published
Abstract [en]

Optical coherence tomography (OCT) is useful for materials defect analysis and inspection with the additional possibility of quantitative dimensional metrology. Here, we present an automated image-processing algorithm for OCT analysis of roll-to-roll multilayers in 3D manufacturing of advanced ceramics. It has the advantage of avoiding filtering and preset modeling, and will, thus, introduce a simplification. The algorithm is validated for its capability of measuring the thickness of ceramic layers, extracting the boundaries of embedded features with irregular shapes, and detecting the geometric deformations. The accuracy of the algorithm is very high, and the reliability is better than 1 mu m when evaluating with the OCT images using the same gauge block step height reference. The method may be suitable for industrial applications to the rapid inspection of manufactured samples with high accuracy and robustness.

Keywords
Segmentation
National Category
Other Physics Topics
Identifiers
urn:nbn:se:kth:diva-142881 (URN)10.1364/JOSAA.31.000217 (DOI)000331070600001 ()2-s2.0-84898064809 (Scopus ID)
Funder
EU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122
Note

QC 20140314

Available from: 2014-03-14 Created: 2014-03-13 Last updated: 2017-12-05Bibliographically approved
Su, R. (2014). Improved inspection and micrometrology of embedded structures in multi-layered ceramics: Development of optical coherence tomographic methods and tools. (Doctoral dissertation). Stockholm: KTH Royal Institute of Technology
Open this publication in new window or tab >>Improved inspection and micrometrology of embedded structures in multi-layered ceramics: Development of optical coherence tomographic methods and tools
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Roll-to-roll manufacturing of micro components based on advanced printing, structuring and lamination of ceramic tapes is rapidly progressing. This large-scale and cost-effective manufacturing process of ceramic micro devices is however prone to hide defects within the visually opaque tape stacks. To achieve a sustainable manufacturing with zero defects in the future, there is an urgent need for reliable inspection systems. The systems to be developed have to perform high-resolution in-process quality control at high speed. Optical coherence tomography (OCT) is a promising technology for detailed in-depth inspection and metrology. Combined with infrared screening of larger areas it can solve the inspection demands in the roll-to-roll ceramic tape processes. In this thesis state-of-art commercial and laboratory OCT systems, operating at the central wavelength of 1.3 µm and 1.7 µm respectively, are evaluated for detecting microchannels, metal prints, defects and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometers beneath surfaces.

The effect of surface roughness induced scattering and scattering by pores on the probing radiation, is analyzed by experimentally captured and theoretically simulated OCT images of the ceramic samples, while varying surface roughnesses and operating wavelengths. By extending the Monte Carlo simulations of the OCT response to the mid-infrared the optimal operating wavelength is found to be 4 µm for alumina and 2 µm for zirconia. At these wavelengths we predict a sufficient probing depth of about 1 mm and we demonstrate and discuss the effect of rough surfaces on the detectability of embedded boundaries.

For high-precision measurement a new and automated 3D image processing algorithm for analysis of volumetric OCT data is developed. We show its capability by measuring the geometric dimensions of embedded structures in ceramic layers, extracting features with irregular shapes and detecting geometric deformations. The method demonstrates its suitability for industrial applications by rapid inspection of manufactured samples with high accuracy and robustness.

The new inspection methods we demonstrate are finally analyzed in the context of measurement uncertainty, both in the axial and lateral cases, and reveal that scattering in the sample indeed affects the lateral measurement uncertainty. Two types of image artefacts are found to be present in OCT images due to multiple reflections between neighboring boundaries and inhomogeneity of refractive index. A wavefront aberration is found in the OCT system with a scanning scheme of two galvo mirrors, and it can be corrected using our image processing algorithm.

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. p. xi, 134
Series
TRITA-IIP, ISSN 1650-1888 ; 14:01
Keywords
Metrology, Optical Coherence Tomography, Ceramics, Embedded Structure, Multilayer, Nondestructive Testing, Optical Inspection, Critical Dimension Measurement, Infrared Imaging, Scattering, Mie Calculation, Image Processing, Monte Carlo Simulation, 测量学, 光学相干断层扫描术,陶瓷,嵌入式结构,多层,无损检测,光学检测,关键尺寸测量,红外成像,散射,Mie计算,图像处理,Monte Carlo模拟
National Category
Engineering and Technology
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-144595 (URN)978-91-7595-090-7 (ISBN)
Public defence
2014-05-16, Brinellsalen, M311, Brinellvägen 68, KTH, Stockholm, 10:00 (English)
Opponent
Supervisors
Projects
Multilayer (FP7-NMP4-2007-214122)
Funder
XPRES - Initiative for excellence in production researchEU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122
Note

QC 20140428

Available from: 2014-04-28 Created: 2014-04-25 Last updated: 2015-01-16Bibliographically approved
Su, R., Kirillin, M., Chang, E., Sergeeva, E., Yun, S. & Mattsson, L. (2014). Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics. Optics Express, 22(13), 15804-15819
Open this publication in new window or tab >>Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics
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2014 (English)In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 22, no 13, p. 15804-15819Article in journal (Refereed) Published
Abstract [en]

Optical coherence tomography (OCT) is a promising tool for detecting micro channels, metal prints, defects and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometers beneath surfaces. The effect of surface roughness and scattering of probing radiation within sample on OCT inspection is analyzed from the experimental and simulated OCT images of the ceramic samples with varying surface roughnesses and operating wavelengths. By Monte Carlo simulations of the OCT images in the mid-IR the optimal operating wavelength is found to be 4 mu m for the alumina samples and 2 mu m for the zirconia samples for achieving sufficient probing depth of about 1 mm. The effects of rough surfaces and dispersion on the detection of the embedded boundaries are discussed. Two types of image artefacts are found in OCT images due to multiple reflections between neighboring boundaries and inhomogeneity of refractive index.

Keywords
Optical coherence tomography, Numerical approximation and analysis, Nondestructive testing, Optical inspection, Surface measurements, roughness, Imaging through turbid media, Infrared imaging, Scattering
National Category
Engineering and Technology
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-144593 (URN)10.1364/OE.22.015804 (DOI)000338055900065 ()2-s2.0-84903729685 (Scopus ID)
Projects
Multilayer (FP7-NMP4-2007-214122)National Institute of Health (P41EB015903)
Funder
XPRES - Initiative for excellence in production researchEU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122
Note

QC 20140807. Updated from submitted to published.

Available from: 2014-04-25 Created: 2014-04-25 Last updated: 2017-12-05Bibliographically approved
Su, R., Chang, E., Ekberg, P., Yun, S. & Mattsson, L. (2013). Enhancement of probing depth and measurement accuracy of optical coherence tomography for metrology of multi-layered ceramics. In: : . Paper presented at 1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing,13.-14.02.2013, Linz, Austria (pp. 71-73).
Open this publication in new window or tab >>Enhancement of probing depth and measurement accuracy of optical coherence tomography for metrology of multi-layered ceramics
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2013 (English)Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

Light scattering strongly limits the probing depth and speckles degrade the image quality in optical coherence tomography (OCT) detection of embedded features in high-scattering ceramics. For high-precision metrology application we evaluated an OCT system working at a centre wavelength of 1.7μm in order to improve the probing depth, and developed a dedicated image processing algorithm for improving the measurement accuracy and speed. The results are demonstrated for 3D OCT measurement of embedded laser-machined pattern in ceramics.

National Category
Other Engineering and Technologies
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-133680 (URN)
Conference
1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing,13.-14.02.2013, Linz, Austria
Funder
EU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122XPRES - Initiative for excellence in production research
Note

QC 20131217

Available from: 2013-11-08 Created: 2013-11-08 Last updated: 2014-04-28Bibliographically approved
Kirillin, M., Su, R., Sergeeva, E., Mattsson, L. & Myllylä, R. (2013). Monte Carlo simulation in optical coherence tomography for quality inspection of materials. In: : . Paper presented at 1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing,13.-14.02.2013, Linz, Austria (pp. 65-67).
Open this publication in new window or tab >>Monte Carlo simulation in optical coherence tomography for quality inspection of materials
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2013 (English)Conference paper, Published paper (Refereed)
Abstract [en]

Quality inspection of materials is one of modern applications of optical coherence tomography (OCT) featuring non-invasiveness and high speed required for in-production control of such materials as paper and alumina ceramics. Some of materials to be controlled are characterized by high scattering which can introduce distortions to the obtained OCT images, therefore additional interpretation can be required in order to evaluate material quality. In order to understand formation of OCT images of highly scattering materials samples and evaluate OCT potential for their quality inspection Monte Carlo simulations could be employed. This paper discusses application of Monte Carlo technique for simulation of OCT inspection of paper and alumina ceramics samples. Implementation of Monte Carlo simulation allows to evaluate the effect of OCT setup parameters and material properties on formation of the OCT-images. Multilayer models of paper and alumina ceramics structures are involved in the study.

Keywords
OCT, Monte Carlo simulations, paper, alumina ceramics
National Category
Other Engineering and Technologies not elsewhere specified
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-133699 (URN)
Conference
1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing,13.-14.02.2013, Linz, Austria
Funder
EU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122XPRES - Initiative for excellence in production research
Note

QC 20131128

Available from: 2013-11-08 Created: 2013-11-08 Last updated: 2014-04-28Bibliographically approved
Su, R. (2012). Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials. (Licentiate dissertation). Stockholm: KTH Royal Institute of Technology
Open this publication in new window or tab >>Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
2012 (English)Licentiate thesis, comprehensive summary (Other academic)
Abstract [en]

Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects.

In this work, alumina ceramic samples are evaluated by optical coherence tomography (OCT) operating at 1.3μm wavelength and some dimensional data are obtained by dedicated image processing and segmentation. Layer thicknesses can be measured and laser-machined channels can be verified embedded at around 100μm depth. Moreover, detection of internal defects is enabled.

Monte Carlo ray tracing simulations are employed to analyze the abilities of OCT in imaging of the embedded channels. The light scattering mechanism is studied for the alumina ceramics, and different scattering origins and models are discussed. The scattering parameters required as input data for simulations are evaluated from the integrating sphere measurements of collimated and diffuse transmittance spectra using a reconstruction algorithm based on refined diffusion approximation approach.

 

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2012. p. vii, 61
Series
Trita-IIP, ISSN 1650-1888 ; 2012:07
Keywords
metrology, optical coherence tomography, alumina ceramics, nondestructive testing, imaging through turbid media, light scattering, image processing, numerical approximation and analysis, Monte Carlo method
National Category
Engineering and Technology
Identifiers
urn:nbn:se:kth:diva-98621 (URN)978-91-7501-398-5 (ISBN)
Presentation
2012-06-08, Sal M311, KTH, Brinellvägen 68, Stockholm, 14:00 (English)
Opponent
Supervisors
Funder
XPRES - Initiative for excellence in production research
Note

QC 20120628

Available from: 2012-06-28 Created: 2012-06-28 Last updated: 2014-04-28Bibliographically approved
Su, R. & Mattsson, L. (2012). Evaluation of optical inspection methods for non-destructive assessment of embedded microstructures and defects in ceramic materials. In: Humbert Noll, Nadja Adamovic and Stefan Dimov (Ed.), Proceedings of the 9th International Conference on Multi-Material Micro Manufacture. Paper presented at 9th International Conference on 4M 2012 Multi-Material Micro Manufacture, (pp. 109-112). Singapore: Research Publishing Services
Open this publication in new window or tab >>Evaluation of optical inspection methods for non-destructive assessment of embedded microstructures and defects in ceramic materials
2012 (English)In: Proceedings of the 9th International Conference on Multi-Material Micro Manufacture / [ed] Humbert Noll, Nadja Adamovic and Stefan Dimov, Singapore: Research Publishing Services, 2012, p. 109-112Conference paper, Oral presentation only (Refereed)
Abstract [en]

The future ceramic micro processing based on tape stacking requires the development of inspection systems toperform high-resolution in-process quality control of embedded manufactured cavities, metal structures anddefects. This paper presents non-destructive techniques for monitoring processes and controlling the differentsteering parameters. Results are shown for optical coherence tomography (OCT), IR-transmission and reflectionmeasurement, and X-ray micro computed tomography. Suitable working conditions are analyzed to improve thedetection performance.

Place, publisher, year, edition, pages
Singapore: Research Publishing Services, 2012
Keywords
Ceramic processing, Non-destructive testing (NDT), Optical inspection, Micrometrology
National Category
Production Engineering, Human Work Science and Ergonomics
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-116467 (URN)978-98107-3353-7 (ISBN)981-07-3353-4 (ISBN)
Conference
9th International Conference on 4M 2012 Multi-Material Micro Manufacture,
Projects
Multilayer project (FP7-NMP4-2007-214122)
Funder
XPRES - Initiative for excellence in production researchEU, FP7, Seventh Framework Programme, NMP2-LA-2008- 214122
Note

Qc 20130204

Available from: 2013-02-04 Created: 2013-01-18 Last updated: 2014-04-28Bibliographically approved
Li, Y., Su, R., Hedlind, M., Ekberg, P., Kjellberg, T. & Mattsson, L. (2012). Model based in-process monitoring with optical coherence tomography. In: Procedia CIRP: 1st CIRP Global Web Conference: Interdisciplinary Research in Production Engineering (CIRPE2012),. Paper presented at The 1st CIRP Global Web Conference: Interdisciplinary Research in Production Engineering, Location: ELECTR NETWORK Date: JUN 12-13, 2012 (pp. 70-73). Elsevier
Open this publication in new window or tab >>Model based in-process monitoring with optical coherence tomography
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2012 (English)In: Procedia CIRP: 1st CIRP Global Web Conference: Interdisciplinary Research in Production Engineering (CIRPE2012),, Elsevier, 2012, p. 70-73Conference paper, Published paper (Refereed)
Abstract [en]

The demands on in-process 3D monitoring in ceramic micromanufacturing industry require a high-precision, non-destructive, rapid and automated inspection technique for measuring the thickness of component layer, determining the shape and dimensions of the embedded 3D structures, and detecting the de-bonding, cracks, warping and deformation. One of the promising metrology techniques is optical coherence tomography (OCT). With the dedicated image processing algorithm and the industrial product data exchange standard, the model-based integration of OCT as a new metrology tool is demonstrated. As a generic standard for any product or manufacturing information, ISO 10303 STEP AP242 is employed for the measured data model. Unambiguous data representation is achieved by integrating additional modelling constraints. The proposed framework allows fully using the technical advantages of OCT to in-process 3D monitoring.

Place, publisher, year, edition, pages
Elsevier, 2012
Series
Procedia CIRP, ISSN 2212-8271
Keywords
OCT, STEP AP242, in-process monitoring, system integration
National Category
Production Engineering, Human Work Science and Ergonomics
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-98352 (URN)10.1016/j.procir.2012.05.042 (DOI)000314660500013 ()2-s2.0-84879192557 (Scopus ID)
Conference
The 1st CIRP Global Web Conference: Interdisciplinary Research in Production Engineering, Location: ELECTR NETWORK Date: JUN 12-13, 2012
Projects
Multilayer project (FP7-NMP4-2007- 214122)XPRES (Initiative for excellence in production research)
Funder
XPRES - Initiative for excellence in production research
Note

QC 20130111

Available from: 2012-06-25 Created: 2012-06-25 Last updated: 2014-04-28Bibliographically approved
Organisations
Identifiers
ORCID iD: ORCID iD iconorcid.org/0000-0003-0776-3716

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