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Noor, Imtisal-e-
Publications (2 of 2) Show all publications
Noor, I.-e., Coenen, J., Martin, A. R., Dahl, O. & Åslin, M. (2019). Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation. Journal of Membrane Science, 579, 283-293
Open this publication in new window or tab >>Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation
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2019 (English)In: Journal of Membrane Science, ISSN 0376-7388, E-ISSN 1873-3123, Vol. 579, p. 283-293Article in journal (Refereed) Published
Abstract [en]

In nano-electronics manufacturing, tetramethylammonium hydroxide (TMAH) is extensively used in the photo-lithography and etching processes, leading to a waste disposal issue. The present study focuses on TMAH wastewater treatment in nano-electronics industries by using membrane distillation technology. Actual TMAH wastewater samples were collected at imec, Belgium. An air gap membrane distillation bench unit was employed to perform the experiments for different operating conditions i.e., feed temperatures and flow rates. High quality water is recovered after reducing the TMAH concentration to 1 ppm and lowering the TOC to 0.8 ppm from 8 ppm. For the industrial scale TMAH wastewater treatment, industrial waste heat driven and district heating driven membrane distillation systems are designed and analyzed. It is determined that 14 GWh thermal energy is required annually to treat 20,000 m 3 of TMAH wastewater/year while considering 65 °C as the membrane distillation feed temperature. Expected unit water treatment cost is found as low as 16 $/m 3 of TMAH wastewater, roughly 80% lower than current disposal costs.

Place, publisher, year, edition, pages
Elsevier, 2019
Keywords
Membrane distillation, Techno-economic analysis, Tetramethylammonium hydroxide, Waste heat, Wastewater
National Category
Energy Engineering
Identifiers
urn:nbn:se:kth:diva-246407 (URN)10.1016/j.memsci.2019.02.067 (DOI)000461667700027 ()2-s2.0-85062439874 (Scopus ID)
Note

QC 20190401

Available from: 2019-04-01 Created: 2019-04-01 Last updated: 2019-04-09Bibliographically approved
Noor, I.-e., Martin, A. R. & Dahl, O. (2018). Membrane distillation - A new approach for treating waste water in nano-electronics industries. In: ECOS 2018 - Proceedings of the 31st International Conference on Efficiency, Cost, Optimization, Simulation and Environmental Impact of Energy Systems: . Paper presented at 31st International Conference on Efficiency, Cost, Optimization, Simulation and Environmental Impact of Energy Systems, ECOS 2018, 17 June 2018 through 21 June 2018. University of Minho
Open this publication in new window or tab >>Membrane distillation - A new approach for treating waste water in nano-electronics industries
2018 (English)In: ECOS 2018 - Proceedings of the 31st International Conference on Efficiency, Cost, Optimization, Simulation and Environmental Impact of Energy Systems, University of Minho , 2018Conference paper, Published paper (Refereed)
Abstract [en]

In this study, a novel industrial application of membrane distillation (MD) is presented for waste water treatment in the nano-electronics industries. Previously reported performance of a semi-commercial Air Gap Membrane Distillation (AGMD) module is employed to evaluate the system operation in the terms of thermal energy analysis. To comply with thermal power demand in the MD systems, different integration possibilities between the MD unit and waste heat sources namely condenser outlet water from heat recovery chiller, process cooling water exhaust from manufacturing tools and hot air from Volatile Organic Compounds (VOCs) abatement combustion system are identified. Along with the technical assessment, this feasibility study has also involved the economic evaluation of the industrial waste heat integrated MD systems including unit water treatment cost. Results show the techno-economic viability of the proposed MD system integrated with industrial waste heat sources. 

Place, publisher, year, edition, pages
University of Minho, 2018
Keywords
Energy analysis, industrial waste heat, membrane distillation, nano-electronics, techno-economic, waste water, cooling systems, cooling water, distillation, economic analysis, energy efficiency, energy management, industrial waste treatment, industrial wastes, industrial water treatment, nanoelectronics, volatile organic compounds, waste heat, waste heat utilization, waste incineration, wastewater, wastewater treatment, air gap membrane distillation, economic evaluations, technical assessment, techno-economics, thermal energy analysis, water treatment costs, industrial economics
National Category
Energy Engineering
Identifiers
urn:nbn:se:kth:diva-252274 (URN)2-s2.0-85064165940 (Scopus ID)9789729959646 (ISBN)
Conference
31st International Conference on Efficiency, Cost, Optimization, Simulation and Environmental Impact of Energy Systems, ECOS 2018, 17 June 2018 through 21 June 2018
Note

QCR 201901027

Available from: 2019-06-07 Created: 2019-06-07 Last updated: 2019-10-31Bibliographically approved
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