Organic electrochemical transistors (OECTs) are promising devices for bioelectronics, such as biosensors. However, current cleanroom-based microfabrication of OECTs hinders fast prototyping and widespread adoption of this technology for low-volume, low-cost applications. To address this limitation, a versatile and scalable approach for ultrafast laser microfabrication of OECTs is herein reported, where a femtosecond laser to pattern insulating polymers (such as parylene C or polyimide) is first used, exposing the underlying metal electrodes serving as transistor terminals (source, drain, or gate). After the first patterning step, conducting polymers, such as poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS), or semiconducting polymers, are spin-coated on the device surface. Another femtosecond laser patterning step subsequently defines the active polymer area contributing to the OECT performance by disconnecting the channel and gate from the surrounding spin-coated film. The effective OECT width can be defined with high resolution (down to 2 µm) in less than a second of exposure. Micropatterning the OECT channel area significantly improved the transistor switching performance in the case of PEDOT:PSS-based transistors, speeding up the devices by two orders of magnitude. The utility of this OECT manufacturing approach is demonstrated by fabricating complementary logic (inverters) and glucose biosensors, thereby showing its potential to accelerate OECT research.

To model complex biological tissue in vitro, a specific layout for the position and numbers of each cell type isnecessary. Establishing such a layout requires manual cell placement in three dimensions (3D) with micrometricprecision, which is complicated and time-consuming. Moreover, 3D printed materials used in compartmentalizedmicrofluidic models are opaque or autofluorescent, hindering parallel optical readout and forcing serial charac-terization methods, such as patch-clamp probing. To address these limitations, we introduce a multi-level co-culture model realized using a parallel cell seeding strategy of human neurons and astrocytes on 3D structuresprinted with a commercially available non-autofluorescent resin at micrometer resolution. Using a two-stepstrategy based on probabilistic cell seeding, we demonstrate a human neuronal monoculture that forms net-works on the 3D printed structure and can establish cell-projection contacts with an astrocytic-neuronal co-cultureseeded on the glass substrate. The transparent and non-autofluorescent printed platform allows fluorescence-based immunocytochemistry and calcium imaging. This approach provides facile multi-level compartmentaliza-tion of different cell types and routes for pre-designed cell projection contacts, instrumental in studying complextissue, such as the human brain.

The performance of two-dimensional (2D) materials is promising for electronic, photonic, and sensing devices since they possess large surface-to-volume ratios, high mechanical strength, and broadband light sensitivity. While significant advances have been made in synthesizing and transferring 2D materials onto different substrates, there is still the need for scalable patterning of 2D materials with nanoscale precision. Conventional lithography methods require protective layers such as resist or metals that can contaminate or degrade the 2D materials and deteriorate the final device performance. Current resist-free patterning methods are limited in throughput and typically require custom-made equipment. To address these limitations, we demonstrate the noncontact and resist-free patterning of platinum diselenide (PtSe2), molybdenum disulfide (MoS2), and graphene layers with nanoscale precision at high processing speed while preserving the integrity of the surrounding material. We use a commercial, off-the-shelf two-photon 3D printer to directly write patterns in the 2D materials with features down to 100 nm at a maximum writing speed of 50 mm/s. We successfully remove a continuous film of 2D material from a 200 μm × 200 μm substrate area in less than 3 s. Since two-photon 3D printers are becoming increasingly available in research laboratories and industrial facilities, we expect this method to enable fast prototyping of devices based on 2D materials across various research areas.

Organic ionic/electronic conductors (OMIECs) offer a promising alternative to metals and inorganic semiconductors for direct interfacing between human-made electronics and biological tissues. A device that takes advantage of the mixed ionic/electronic conductivity of OMIEC materials is the organic electrochemical transistor (OECT). High-density OECTs are typically fabricated using costly cleanroom-based lithography and complex lift-off processes. To simplify the fabrication of OECTs, we propose laser direct writing of conjugated polymers using a commercial two-photon polymerization 3D printer. Ultrafast laser direct writing allows single-digit micrometer resolution and high-speed processing, thereby enabling a cost-effective and simple fabrication process.

Light is the primary source of energy on our planet and has been a significant driver in the evolution of human society and technology. Light finds applications in two-dimensional (2D) photolithography and three-dimensional (3D) printing, where a pattern is transferred to a material of interest by ultraviolet (UV) light exposure, and in laser scribing and cutting, where high power lasers are used to pattern the surface of objects or cut through the bulk of the material of interest. However, conventional light-based processing has three main constraints: a) the wavelength of visible light limits resolution, b) only materials that absorb the wavelength in use can be efficiently processed, and c) intense laser light burns its target, degrading the material surrounding the exposed areas and further limiting material compatibility. Overcoming these limitations is the core of this thesis.

The first part of this thesis describes three different patterning methods enabled by intelligent design and non-linear light-matter interaction. The first work reports the use of light at 365 nm to generate sub-20 nm wide nanowires (NWs) exploiting crack lithography, exceeding the possible resolution given by diffraction limit by 10-fold. The second work describes how the non-linear interaction of femtosecond laser pulses with otherwise transparent glass enables nanostructuring of borosilicate coverslips. Positively charging the nanostructured glass surfaces grants a “attract and destroy” bactericidal functionality and maintains the transparency of the substrate, creating a microscopy compatible platform to study bacteria-surface interactions and providing strategies to fight antibiotic-resistant bacteria. The third and fourth works show how femtosecond lasers can directly pattern carbon nanotube films and 2D materials (graphene, molybdenum disulfide, and platinum diselenide) without damaging the substrate or the material surrounding the exposed area. Non-linear interaction with high-energy laser pulses allows sub-300 nm resolution, circumventing the limit given by light diffraction in the linear regime. The combination of high resolution, femtosecond exposure, and ultrafast scanning speed provides a valid alternative to resist-based photolithography while eliminating the related contamination issues for these sensitive materials.

The second part of this thesis describes two different 3D micromachining approaches enabled by high-intensity laser light. The fifth work presents a collagen patterning method based on laser-induced cavitation, called cavitation molding. This method represents a new biomanufacturing mode that is neither additive nor subtractive. In this study, cavitation molding enables the generation of a micro vascularized cancer-on-chip model, consisting of an in-vivo-like spheroidal mass of cancer cells surrounded by artificial blood vessels. In the sixth and final work, we used two-photon polymerization to generate 3D platforms in a biocompatible resin. This platform enables the study of the physiology of neurons and their interaction with astrocyte cells. The low autofluorescence of the printed resins allows optical readout of the neuronal activity by calcium imaging.

Ljus är den primära energikällan på vår planet och har varit en viktig motivation i utvecklingen av det mänskliga samhället och teknologin. Inom mikrotillverkning finner ljus tillämpningar inom fotolitografi och 3D-printing, där ett 2D- eller 3D-mönster överförs till ett material av intresse genom exponering för UV-ljus, och i laserritning och skärning, där högeffektlasrar används för att skapa mönster på föremålets yta eller skära igenom huvuddelen av materialet av intresse. Likväl, har dock konventionell ljusbaserad bearbetning tre huvudbegränsningar: a) våglängden för synligt ljus begränsar upplösningen, b) endast material som absorberar våglängden vid användning kan bearbetas effektivt, och c) intensivt laserljus bränner upp sitt målobjekt, vilket försämrar materialet som omger de exponerade områdena och ytterligare begränsar materialkompatibiliteten. Att övervinna dessa begränsningar är kärnan i denna avhandling.

Den första delen av denna avhandling beskriver tre olika tvådimensionella mönstringsmetoder som möjliggörs av intelligent design och icke-linjär ljus-materia interaktion. Det första arbetet rapporterar användningen av ljus vid 365 nm för att generera sub-20 nm breda nanotrådar (NW) genom att utnyttja cracklitografi, vilket överskrider den möjliga upplösningen som ges av diffraktionsgränsen tiofaldigt. Det andra verket beskriver användningen av femtosekundlaserpulser för att strukturera ytan på glasskivor, som vanligtvis skulle vara transparenta för mindre intensivt synligt ljus. Positiv laddning av de nanostrukturerade glasytorna ger en "sök och förstör" bakteriedödande funktionalitet, vilket möjliggör nya grundläggande studier av interaktioner mellan bakterier och yta och tillhandahåller strategier för att bekämpa antibiotikaresistenta bakterier. Det tredje och fjärde verket visar hur ultrasnabba lasrar selektivt kan mönstra 2D-material – grafen, molybdendisulfid och platinadiselenid – och tunna filmer – kolnanorörsfilm – utan att skada substratet eller materialet som omger det exponerade området. Direkt mönstring med ultrasnabb skanningshastighet ger processskalbarhet och upplösning under 300 nm, vilket ger ett giltigt alternativ till resistbaserad fotolitografi och relaterade kontamineringsproblem för dessa känsliga material.

Den andra delen av denna avhandling beskriver två olika 3D-mikrobearbetningsmetoder som möjliggörs av högintensivt laserljus. Det femte arbetet presenterar en biotillverkningsmetod för att strukturera kollagen baserat på laserinducerad kavitation. Denna metod, kallad kavitationsgjutning, representerar ett nytt biotillverkningsläge som varken är additivt eller subtraktivt. I denna studie möjliggör kavitationsformning genereringen av en mikrovaskulariserad cancer-on-chip-modell, bestående av en in-vivo-liknande sfäroidal massa av cancerceller omgivna av konstgjorda blodkärl. I det sjätte och sista arbetet använde vi två-fotonpolymerisation för att generera icke-cytotoxiska 3D-strukturer för att studera neuronernas fysiologi och deras interaktion med astrocytceller. Den låga autofluorescensen hos de tryckta hartserna tillåter optisk avläsning av den neuronala aktiviteten genom kalciumavbildning.

Antimicrobial surfaces are important in medical, clinical, and industrial applications, where bacterial infection and biofouling may constitute a serious threat to human health. Conventional approaches against bacteria involve coating the surface with antibiotics, cytotoxic polymers, or metal particles. However, these types of functionalization have a limited lifetime and pose concerns in terms of leaching and degradation of the coating. Thus, there is a great interest in developing long-lasting and non-leaching bactericidal surfaces. To obtain a bactericidal surface, we combine micro and nanoscale patterning of borosilicate glass surfaces by ultrashort pulsed laser irradiation and a non-leaching layer-by-layer polyelectrolyte modification of the surface. The combination of surface structure and surface charge results in an enhanced bactericidal effect against both Gram-positive Staphylococcus aureus and Gram-negative Escherichia coli bacteria. The laser patterning and the layer-by-layer modification are environmentally friendly processes that are applicable to a wide variety of materials, which makes this method uniquely suited for fundamental studies of bacteria-surface interactions and paves the way for its applications in a variety of fields, such as in hygiene products and medical devices.

Single nanowires have a broad range of applications in chemical and bio-sensing, photonics, and material science, but realizing individual nanowire devices in a scalable manner remains extremely challenging. This work presents a scalable and flexible method to realize single gold nanowire devices. We use conventional optical stepper lithography to generate notched beam structures, and crack lithography to obtain sub-20-nm-wide nanogaps at the notches, thereby obtaining a suitable shadow mask to define a single nanowire device. Then a gold evaporation step through the shadow mask forms the individual gold nanowires with positional and dimensional accuracy and with electrical contacts to probing pads.

Single nanowires (NWs) have a broad range of applications in nanoelectronics, nanomechanics, and nano photonics, but, to date, no technique can produce single sub 20 nm wide NWs with electrical connections in a scalable fashion. In this work, we combine conventional optical and crack lithographies to generate single NW devices with controllable and predictable dimensions and placement and with individual electrical contacts to the NWs. We demonstrate NWs made of gold, platinum, palladium, tungsten, tin, and metal oxides. We have used conventional i-line stepper lithography with a nominal resolution of 365 nm to define crack lithography structures in a shadow mask for large-scale manufacturing of sub-20 nm wide NWs, which is a 20-fold improvement over the resolution that is possible with the utilized stepper lithography. Overall, the proposed method represents an effective approach to generate single NW devices with useful applications in electrochemistry, photonics, and gas- and biosensing.

Scalable and cost-efficient transfer of nanomaterials and microstructures from their original fabrication substrate to a new host substrate is a key challenge for realizing heterogeneously integrated functional systems, such as sensors, photonics, and electronics. Here we demonstrate a high-throughput and versatile integration method utilizing conventional wire bonding tools to transfer-print carbon nanotubes (CNTs) and silicon microstructures. Standard ball stitch wire bonding cycles were used as scalable and high-speed pick-and-place operations to realize the material transfer. Our experimental results demonstrated successful transfer printing of single-walled CNTs (100 μm-diameter patches) from their growth substrate to polydimethylsiloxane, parylene, or Au/parylene electrode substrates, and realization of field emission cathodes made of CNTs on a silicon substrate. Field emission measurements manifested excellent emission performance of the CNT electrodes. Further, we demonstrated the utility of a high-speed wire bonder for transfer printing of silicon microstructures (60 μm × 60 μm × 20 μm) from the original silicon on insulator substrate to a new host substrate. The achieved placement accuracy of the CNT patches and silicon microstructures on the target substrates were within ± 4 μm. These results show the potential of using established and extremely cost-efficient semiconductor wire bonding infrastructure for transfer printing of nanomaterials and microstructures to realize integrated microsystems and flexible electronics.