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Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-7033-2452
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8514-6863
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8264-3231
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2019 (English)In: IEEE Transactions on Terahertz Science and Technology, ISSN 2156-342X, E-ISSN 2156-3446, Vol. 9, no 1Article in journal (Refereed) Published
Abstract [en]

This letter presents two silicon-micromachined narrowband fourth-order waveguide filter concepts with center frequency of 450 GHz, which are the first narrowband submillimeter-wave filters implemented in any technology with a fractional bandwidth as low as 1%. Both filters designs are highly compact and have axial port arrangements, so that they can be mounted directly between two standard waveguide flanges without needing any split-block interposers. The first filter concept contains two TM 110 dual-mode cavities of circular shape with coupling slots and perturbations arranged in two vertically stacked layers, while the second filter concept is composed of four TE 101 series resonators arranged in a folded, two-level topology without crosscouplings. Prototype devices are fabricated in a multilayer chip platform by high-precision, low-surface roughness deep-silicon etching on silicon-on-insulator wafers. The measured passband insertion loss of two prototype devices of the dual-mode circular-cavity filters is 2.3 dB, and 2.6 dB for three prototypes of the folded filter design. The corresponding extracted unloaded quality factors of the resonators are 786 ± 7 and 703 ± 13, respectively, which are the best so far reported for submillimeter-wave filters in any technology. The presented filters are extremely compact in terms of size; their footprints have areas of only 0.53 and 0.55 mm 2 , respectively, and the thickness between the waveguide flanges is 0.9 mm.

Place, publisher, year, edition, pages
2019. Vol. 9, no 1
Keywords [en]
All-pole filters, dual-mode filters, microfabrication, micromachining technology, waveguide filters
National Category
Telecommunications
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-242575DOI: 10.1109/TTHZ.2018.2883075ISI: 000455919800012Scopus ID: 2-s2.0-85057418315OAI: oai:DiVA.org:kth-242575DiVA, id: diva2:1284524
Funder
EU, Horizon 2020, 616846Swedish Foundation for Strategic Research , SE13-007
Note

QC 20190204

Available from: 2019-01-31 Created: 2019-01-31 Last updated: 2019-07-10Bibliographically approved

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Glubokov, OleksandrXinghai, ZhaoCampion, JamesShah, UmerOberhammer, Joachim

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