Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
2019 (English)Conference paper, Poster (with or without abstract) (Refereed)
Abstract [en]

We experimentally demonstrate a silicon MEMS phase shifter achieving more than π phase shift with sub-dB insertion loss (IL).  The phase is tuned by reducing the gap between a static suspended waveguide and a free silicon beam, via comb-drive actuation.  Our device reaches 1.2π phase shift at only 20 V, with only 0.3 dB insertion loss – an order of magnitude improvement over previously reported MEMS devices.  The device has a small footprint of 50×70 µm2 and its power consumption is 5 orders of magnitude lower than that of traditional thermal phase shifters.  Our new phase shifter is a fundamental building block of the next-generation large scale reconfigurable photonic circuits which will find applications in datacenter interconnects, artificial intelligence (AI), and quantum computing.

Place, publisher, year, edition, pages
2019.
Keywords [en]
silicon photonics, reconfigurable photonics, photonic mems
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-246037OAI: oai:DiVA.org:kth-246037DiVA, id: diva2:1295381
Conference
The 32nd IEEE International Conference on Micro Electro Mechanical Systems
Projects
Morphic
Note

QC 20190312

Available from: 2019-03-11 Created: 2019-03-11 Last updated: 2019-03-12Bibliographically approved

Open Access in DiVA

fulltext(445 kB)99 downloads
File information
File name FULLTEXT01.pdfFile size 445 kBChecksum SHA-512
ffe2c89a3f65f508b745de77655fec7ec90adff649e50dd3f668bca32039a349f4a28d85a0f4a25fa52988368bc15969eca1877b5379cead9a9768e0e9f996e4
Type fulltextMimetype application/pdf

Other links

Conference webpage

Authority records BETA

Edinger, PierreErrando-Herranz, CarlosGylfason, Kristinn

Search in DiVA

By author/editor
Edinger, PierreErrando-Herranz, CarlosGylfason, Kristinn
By organisation
Micro and Nanosystems
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 99 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 1656 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf