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A graphene/h-BN MEMS varactor for sub-THz and THz applications
CENTERA Laboratories, Institute of High Pressure Physics Polish Academy of Sciences, Sokołowska 29/37, 01-142 Warsaw, Poland.ORCID iD: 0000-0001-5546-5030
CENTERA Laboratories, Institute of High Pressure Physics Polish Academy of Sciences, Sokołowska 29/37, 01-142 Warsaw, Poland;Centre for Advanced Materials and Technologies (CEZAMAT), Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland.ORCID iD: 0000-0002-0170-4988
CENTERA Laboratories, Institute of High Pressure Physics Polish Academy of Sciences, Sokołowska 29/37, 01-142 Warsaw, Poland;Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2, 00-908 Warsaw, Poland.
CENTERA Laboratories, Institute of High Pressure Physics Polish Academy of Sciences, Sokołowska 29/37, 01-142 Warsaw, Poland.
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2023 (English)In: Nanoscale, ISSN 2040-3364, E-ISSN 2040-3372, Vol. 15, no 30, p. 12530-12539Article in journal (Refereed) Published
Abstract [en]

Recent development of terahertz systems has created the need for new elements operating in this frequency band, i.e., fast tunable devices such as varactors. Here, we present the process flow and characterization of a novel electronic variable capacitor device that is made with the use of 2D metamaterials such as graphene (GR) or hexagonal boron nitride (h-BN). Comb-like structures are etched into a silicon/silicon nitride substrate and a metal electrode is deposited at the bottom. Next, a PMMA/GR/h-BN layer is placed on top of the sample. As voltage is applied between GR and metal, the PMMA/GR/h-BN layer bends towards the bottom electrode thus decreasing the distance between electrodes and changing the capacitance. The high tunability and complementary metal oxide semiconductor (CMOS)-compatible process flow of the platform for our device and its millimeter size make it promising for applications in future electronics and terahertz technologies. The goal of our research is to integrate our device with dielectric rod waveguides, thus making THz phase shifters.

Place, publisher, year, edition, pages
Royal Society of Chemistry (RSC) , 2023. Vol. 15, no 30, p. 12530-12539
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-334383DOI: 10.1039/d2nr06863jISI: 001019032900001PubMedID: 37387628Scopus ID: 2-s2.0-85164362945OAI: oai:DiVA.org:kth-334383DiVA, id: diva2:1789299
Funder
EU, Horizon 2020, 862788
Note

Correction in: Nanoscale, vol. 15, issue 31, pages 13133. DOI:10.1039/D3NR90137H, Scopus:2-s2.0-85167842690

QC 20230818

Available from: 2023-08-18 Created: 2023-08-18 Last updated: 2023-08-31Bibliographically approved

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Lioubtchenko, Dmitri

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