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3D Printed Mems
Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan.ORCID iD: 0000-0002-7659-842X
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8822-5014
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0009-0003-4252-9973
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.
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2025 (English)In: Proceedings 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers (IEEE) , 2025Conference paper, Published paper (Refereed)
Abstract [en]

3D printing at the macroscale has evolved from making plastic prototypes to the production of high-performance functional metal parts for industries such as medical and aerospace. By contrast, MEMS devices today are produced in large quantities using semiconductor manufacturing processes. However, the semiconductor manufacturing paradigm is not cost-effective for producing customized MEMS devices in small to medium volumes (tens to thousands of units per year), and related applications are difficult to address efficiently. 3D printing of functional MEMS devices could play an important role in filling this gap. Here, we discuss recent advances in 3D- printed functional MEMS, addressing the challenges of economical customization at smaller production volumes.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2025.
National Category
Nanotechnology
Identifiers
URN: urn:nbn:se:kth:diva-361578DOI: 10.1109/MEMS61431.2025.10917711Scopus ID: 2-s2.0-105001661373OAI: oai:DiVA.org:kth-361578DiVA, id: diva2:1946869
Conference
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), Kaohsiung, Taiwan, 19-23 January 2025
Note

Part of ISBN 979-8-3315-0889-0

QC 20250325

Available from: 2025-03-24 Created: 2025-03-24 Last updated: 2025-05-05Bibliographically approved

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Huang, Po-HanLai, Lee-LunIordanidis, Theocharis N.Watanabe, ShiroStemme, GöranRoxhed, NiclasGylfason, KristinnNiklaus, Frank

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Huang, Po-HanLai, Lee-LunIordanidis, Theocharis N.Watanabe, ShiroStemme, GöranRoxhed, NiclasGylfason, KristinnNiklaus, Frank
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Micro and Nanosystems
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