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Low-power optical beam steering by microelectromechanical waveguide gratings
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
Univ Ghent, Photon Res Grp, INTEC Dept, Imec, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium.;Univ Ghent, Ctr Nano & Biophoton, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium..
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
2019 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 44, no 4, p. 855-858Article in journal (Refereed) Published
Abstract [en]

Optical beam steering is key for optical communications, laser mapping (lidar), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower-cost, and more power-efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, to the best of our knowledge, beam steering by microelectromechanical (MEMS) actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6 degrees beam steering with 20 V actuation and power consumption below the mu W level, i.e., more than five orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.

Place, publisher, year, edition, pages
OPTICAL SOC AMER , 2019. Vol. 44, no 4, p. 855-858
National Category
Accelerator Physics and Instrumentation
Identifiers
URN: urn:nbn:se:kth:diva-245134DOI: 10.1364/OL.44.000855ISI: 000458786800034PubMedID: 30768004Scopus ID: 2-s2.0-85061536509OAI: oai:DiVA.org:kth-245134DiVA, id: diva2:1296014
Note

QC 20190313

Available from: 2019-03-13 Created: 2019-03-13 Last updated: 2019-03-18Bibliographically approved

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Errando-Herranz, CarlosGylfason, Kristinn

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