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Refractive index sensing in the visible/NIR spectrum using silicon nanopillar arrays
KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
2017 (engelsk)Inngår i: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 25, nr 11, s. 12171-12181Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Si nanopillar (NP) arrays are investigated as refractive index sensors in the visible/NIR wavelength range, suitable for Si photodetector responsivity. The NP arrays are fabricated by nanoimprint lithography and dry etching, and coated with thin dielectric layers. The reflectivity peaks obtained by finite-difference time-domain (FDTD) simulations show a linear shift with coating layer thickness. At 730 nm wavelength, sensitivities of ∼0.3 and ∼0.9 nm/nm of SiO2 and Si3N4, respectively, are obtained; and the optical thicknesses of the deposited surface coatings are determined by comparing the experimental and simulated data. The results show that NP arrays can be used for sensing surface bio-layers. The proposed method could be useful to determine the optical thickness of surface coatings, conformal and non-conformal, in NP-based optical devices.

sted, utgiver, år, opplag, sider
Optical Society of America, 2017. Vol. 25, nr 11, s. 12171-12181
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URN: urn:nbn:se:kth:diva-209610DOI: 10.1364/OE.25.012171ISI: 000403940700011Scopus ID: 2-s2.0-85019999525OAI: oai:DiVA.org:kth-209610DiVA, id: diva2:1113179
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QC 20170621

Tilgjengelig fra: 2017-06-21 Laget: 2017-06-21 Sist oppdatert: 2017-11-29bibliografisk kontrollert

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Visser, DennisDev Choudhury, BikashKrasovska, IneseAnand, Srinivasan
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