Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Are the argon metastables important in high power impulse magnetron sputtering discharges?
KTH, Skolan för elektro- och systemteknik (EES), Rymd- och plasmafysik. University of Iceland, Iceland.ORCID-id: 0000-0002-8153-3209
KTH, Skolan för elektro- och systemteknik (EES), Rymd- och plasmafysik. Linköping University, Sweden.
Vise andre og tillknytning
2015 (engelsk)Inngår i: Physics of Plasmas, ISSN 1070-664X, E-ISSN 1089-7674, Vol. 22, nr 11, artikkel-id 113508Artikkel i tidsskrift (Fagfellevurdert) Published
Resurstyp
Text
Abstract [en]

We use an ionization region model to explore the ionization processes in the high power impulse magnetron sputtering (HiPIMS) discharge in argon with a titanium target. In conventional dc magnetron sputtering (dcMS), stepwise ionization can be an important route for ionization of the argon gas. However, in the HiPIMS discharge stepwise ionization is found to be negligible during the breakdown phase of the HiPIMS pulse and becomes significant (but never dominating) only later in the pulse. For the sputtered species, Penning ionization can be a significant ionization mechanism in the dcMS discharges, while in the HiPIMS discharge Penning ionization is always negligible as compared to electron impact ionization. The main reasons for these differences are a higher plasma density in the HiPIMS discharge, and a higher electron temperature. Furthermore, we explore the ionization fraction and the ionized flux fraction of the sputtered vapor and compare with recent experimental work.

sted, utgiver, år, opplag, sider
American Institute of Physics (AIP), 2015. Vol. 22, nr 11, artikkel-id 113508
HSV kategori
Identifikatorer
URN: urn:nbn:se:kth:diva-180520DOI: 10.1063/1.4935402ISI: 000366054900078Scopus ID: 2-s2.0-84947297159OAI: oai:DiVA.org:kth-180520DiVA, id: diva2:895097
Merknad

QC 20160118

Tilgjengelig fra: 2016-01-18 Laget: 2016-01-14 Sist oppdatert: 2017-11-30bibliografisk kontrollert

Open Access i DiVA

Fulltekst mangler i DiVA

Andre lenker

Forlagets fulltekstScopus

Søk i DiVA

Av forfatter/redaktør
Gudmundsson, Jon TomasBrenning, Nils
Av organisasjonen
I samme tidsskrift
Physics of Plasmas

Søk utenfor DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 59 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf