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550 degrees C 4H-SiC p-i-n Photodiode Array With Two-Layer Metallization
KTH, Skolan för informations- och kommunikationsteknik (ICT), Elektronik.ORCID-id: 0000-0001-8854-7446
KTH, Skolan för informations- och kommunikationsteknik (ICT), Elektronik, Integrerade komponenter och kretsar.ORCID-id: 0000-0001-6705-1660
KTH, Skolan för informations- och kommunikationsteknik (ICT), Elektronik.ORCID-id: 0000-0001-8108-2631
KTH, Skolan för informations- och kommunikationsteknik (ICT), Elektronik.ORCID-id: 0000-0002-5845-3032
2016 (Engelska)Ingår i: IEEE Electron Device Letters, ISSN 0741-3106, E-ISSN 1558-0563, Vol. 37, nr 12, s. 1594-1596Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

The p-i-n ultraviolet (UV) photodiodes based on 4H-SiC have been fabricated and characterized from room temperature (RT) to 550 degrees C. Due to bandgap narrowing at higher temperatures, the photocurrent of the photodiode increases by 9 times at 365 nm and reduces by 2.6 times at 275 nm from RT to 550 degrees C. Moreover, a 4H-SiC p-i-n photodiode array has been fabricated. Each column and row of the array is separately connected by two-layer metallization.

Ort, förlag, år, upplaga, sidor
IEEE, 2016. Vol. 37, nr 12, s. 1594-1596
Nyckelord [en]
4H-SiC, UV, photodiode, high temperature, two-layer metallization
Nationell ämneskategori
Elektroteknik och elektronik
Identifikatorer
URN: urn:nbn:se:kth:diva-199496DOI: 10.1109/LED.2016.2618122ISI: 000389332700016Scopus ID: 2-s2.0-85000786021OAI: oai:DiVA.org:kth-199496DiVA, id: diva2:1066492
Anmärkning

QC 20170118

Tillgänglig från: 2017-01-18 Skapad: 2017-01-09 Senast uppdaterad: 2019-04-10Bibliografiskt granskad
Ingår i avhandling
1. Silicon Carbide High Temperature Photodetectors and Image Sensor
Öppna denna publikation i ny flik eller fönster >>Silicon Carbide High Temperature Photodetectors and Image Sensor
2019 (Engelska)Doktorsavhandling, sammanläggning (Övrigt vetenskapligt)
Abstract [en]

Silicon Carbide (SiC) has the advantages of ultraviolet (UV) sensing and high temperature characteristics because of its wide band gap. Both merits make SiC photodetectors very attractive in astronomy, oil drilling, combustion detection, biology and medical applications. Driven by the objective of probing the high temperature surface of Venus (460 °C), this thesis develops SiC photodetectors and an image sensor for extremely high temperature functions. The devices and circuits are demonstrated through the procedure of layout design, in-house processing and characterizations on two batches.

The process flow has been optimized to be suitable for large scale integration (LSI) of SiC bipolar integrated circuits (IC). The improved processing steps are SiC dry etching, ohmic contacts and two-level metal interconnect with chemical-mechanical polishing (CMP). The optimized process flow is applied in the fabrication of discrete devices, a transistor-transistor logic (TTL) process design kit (PDK) and LSI circuits.

The photodetectors developed in this thesis, including photodiodes with various mesa areas, a phototransistor and a phototransistor Darlington pair have stable characteristics in a wide temperature range (25 °C ~ 500 °C). The maximum operational temperature of the p-i-n photodiode (550 °C) is the highest recorded temperature accomplished ever by a photodiode. The optical responsivity of the photodetectors covers the spectrum from 220 nm to 380 nm, which is UV-only.

The SiC pixel sensor and image sensor developed in this thesis are pioneer works. The pixel sensor overcomes the challenge of monolithic integration of SiC photodiode and transistors by sharing the same epitaxial layers and topside contacts. The pixel sensor is characterized from 25 °C to 500 °C. The whole image sensor circuit has 256 (16 ×16) pixel sensors and one 8-bit counter together with two 4-to-16 decoders for row/column selection. The digital circuits are built by the standard logic gates selected from the TTL PDK. The image sensor has 1959 transistors in total. The function of the image sensor up to 400 °C is verified by taking basic photos of nonuniform UV illumination on the pixel sensor array.

This thesis makes an important attempt on the demonstration of SiC opto-electronic on-chip integration. The results lay a foundation on the development of future high temperature high resolution UV image sensors.

Ort, förlag, år, upplaga, sidor
KTH Royal Institute of Technology, 2019. s. 81
Serie
TRITA-EECS-AVL ; 2019:37
Nyckelord
Silicon Carbide (SiC), high temperature, photodetector, photodiode, phototransistor, ultraviolet (UV), transistor-transistor logic (TTL), bipolar junction transistor (BJT), integrated circuit (IC), pixel sensor, image sensor
Nationell ämneskategori
Elektroteknik och elektronik
Forskningsämne
Informations- och kommunikationsteknik
Identifikatorer
urn:nbn:se:kth:diva-248426 (URN)978-91-7873-160-2 (ISBN)
Disputation
2019-05-03, Ka-Sal B (Sal Peter Weissglas), Kistagången 16, Kista, 10:00 (Engelska)
Opponent
Handledare
Forskningsfinansiär
Knut och Alice Wallenbergs Stiftelse, Working on VenusStiftelsen för strategisk forskning (SSF), CMP Lab
Anmärkning

QC 20190411

Tillgänglig från: 2019-04-11 Skapad: 2019-04-09 Senast uppdaterad: 2019-04-11Bibliografiskt granskad

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Hou, ShuobenHellström, Per-ErikZetterling, Carl-MikaelÖstling, Mikael
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ElektronikIntegrerade komponenter och kretsar
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IEEE Electron Device Letters
Elektroteknik och elektronik

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