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Lateral performance evaluation of laser micromachining by highprecision optical metrology and image analysis
KTH, Skolan för industriell teknik och management (ITM), Industriell produktion. (Manufacturing and Metrology systems)ORCID-id: 0000-0001-5214-5736
KTH, Skolan för industriell teknik och management (ITM), Industriell produktion. (Manufacturing and Metrology systems)
KTH, Skolan för industriell teknik och management (ITM), Industriell produktion. (Manufacturing and Metrology systems)
2017 (engelsk)Inngår i: Precision engineering, ISSN 0141-6359, E-ISSN 1873-2372, ISSN 0141-6359Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Today several techniques are available for micro-manufacturing. Yet, it is difficult to assess the precisionand lateral X,Y accuracy of these techniques. The available accuracy information is usually based on spec-ifications given by machine suppliers. This information is based on in-house laboratory tests performedby dedicated machine operators and within an adapted environment. In practice, the accuracy is likelyto vary due to environmental conditions, materials and operator skills. In order to check the specifica-tions in realistic environments the EUMINAfab infrastructure consortium initiated a set of independenthigh precision onsite verification tests on different laser micromachining installations. In addition toproviding performance verification, it gave the participating partners real capability information of theirequipment and possibilities to improve machining performance to a higher level. In this study a compre-hensive verification test was designed and carried out by using a high precision metrology method for 2Dmeasurements based on subpixel resolution image analysis. This methodology improved our knowledgeof the capabilities of three laser micromachining installations, and showed that specifications at singlemicron levels are hard to obtain.

sted, utgiver, år, opplag, sider
Elsevier, 2017.
Emneord [en]
Verification test, Performance evaluation, Quality audit, Error, Accuracy, Precision metrology, Repeatability, Laser micro-machining, Image processing, Image analysis, Image metrology, Sub-pixel
HSV kategori
Forskningsprogram
Industriell produktion
Identifikatorer
URN: urn:nbn:se:kth:diva-207583DOI: 10.1016/j.precisioneng.2017.04.008ISI: 000409151100002Scopus ID: 2-s2.0-85018411058OAI: oai:DiVA.org:kth-207583DiVA, id: diva2:1097119
Prosjekter
EUMINAfab
Merknad

QC 20170523

Tilgjengelig fra: 2017-05-22 Laget: 2017-05-22 Sist oppdatert: 2017-10-11bibliografisk kontrollert
Inngår i avhandling
1. Enhanced image analysis, a tool for precision metrology in the micro and macro world
Åpne denne publikasjonen i ny fane eller vindu >>Enhanced image analysis, a tool for precision metrology in the micro and macro world
2017 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

The need for high speed and cost efficient inspection in manufacturing lineshas led to a vast usage of camera-based vision systems. The performance ofthese systems is sufficient to determine shape and size, but hardly to an accuracylevel comparable with traditional metrology tools. To achieve highprecision shape/position/defect measurements, the camera techniques haveto be combined with high performance image metrology techniques whichare developed and adapted to the manufactured components. The focus ofthis thesis is the application of enhanced image analysis as a tool for highprecision metrology. Dedicated algorithms have been developed, tested andevaluated in three practical cases ranging from micro manufacturing at submicronprecision to meter sized aerospace components with precision requirementsin the 10 μm range.The latter measurement challenge was solved by low cost standard consumerproducts, i.e. digital cameras in a stereo configuration and structured lightfrom a gobo-projector. Combined with high-precision image analysis and anew approach in camera calibration and 3D reconstruction for precise 3Dshape measurement of meter sized surfaces, the achievement was fulfilledand verified by two conventional measurement systems; a high precisioncoordinate measurement machine and a laser scanner.The sub-micron challenge was the implementation of image metrology forverification of micro manufacturing installations within a joint Europeaninfrastructure network, EUMINAfab. The results were an unpleasant surprisefor some of the participating laboratories, but became a big step forwardto improve the dimensional accuracy of the investigated laser micromachining, micro milling and micro-printing systems, since the accuracy ofthese techniques are very difficult to assess.The third high precision metrology challenge was the measurement of longrange,low-amplitude topographic structures on specular (shiny) aerodynamicsurfaces. In this case Fringe Reflection Technique (FRT) was appliedand image analysis algorithms were used to evaluate the fringe deformationas a measure of the surface slopes to obtain high resolution data. The resultwas compared with an interferometric analysis showing height deviation inthe range of tens of micrometers over a lateral extension of several cm.

sted, utgiver, år, opplag, sider
KTH Royal Institute of Technology, 2017. s. 120
Serie
TRITA-IIP, ISSN 1650-1888 ; TRITA IIP-17-05
Emneord
Image processing, image metrology, precision metrology, image correlation, subpixel, accuracy, uncertainty
HSV kategori
Forskningsprogram
Industriell produktion
Identifikatorer
urn:nbn:se:kth:diva-207594 (URN)978-91-7729-392-7 (ISBN)
Disputas
2017-06-15, M311, Brinellvägen 68, Stockholm, 10:00 (engelsk)
Opponent
Veileder
Prosjekter
LOCOMACHSEUMINAfabCleansky
Merknad

QC 20170523

Tilgjengelig fra: 2017-05-23 Laget: 2017-05-22 Sist oppdatert: 2017-05-23bibliografisk kontrollert

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Forlagets fulltekstScopushttp://dx.doi.org/10.1016/j.precisioneng.2017.04.008

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