Improving the health and well-being of humankind does not only constitute
part of our moral codes, but is also enlisted as the number three goal of
the 2030 agenda for sustainable development set by the UN. Fulfilling such
objective in the regions of resource-poor settings or for age groups with more
vulnerability to infectious agents demands immediate actions. This has necessitated
novel ways of rapid and ultra-sensitive diagnostics to provide compact
and affordable systems, e.g. for an early detection of bacteria and viruses.
The fields of bio-micro/nanoelectromechanical systems (BioMEMS/NEMS)
and lab-on-a-chip (LoC) have been founded based on such demands, but
critically challenged by problems partly associated with manufacturing and
material domains and biosensing methods. The fabrication methods for the
miniaturization of features and components are often complicated and expensive,
the commonly used materials are typically not adaptable to industrial
settings, and the sensing mechanisms are sometimes not sensitive enough for
the detection of lowly-concentrated samples.
In this thesis, new methods of ultra-miniaturization, as well as conventional
cleanroom-based techniques, for nanopatterning of well-defined topographies
in off-stoichiometry thiol-ene-(epoxy) polymers are presented. In addition,
their use for several sensing applications has been demonstrated. The
first part of the thesis gives an introduction to the field of BioMEMS/NEMS.
The second part of the thesis presents a technical background about the
prevalent methods of polymer micro- and nanofabrication, implementation
of the resulting polymer structures for different sensing applications, along
with the existing challenges and shortcomings associated with state of the
art. The third part of the thesis presents e-beam nanostructuring of thiol-ene
resist, for the first time, achieving the smallest and densest features reported
in these polymer networks. The thiol-ene-based polymer also represents a
novel class of e-beam resist resulting in structures with reactive surface nature.
The fourth part of the thesis demonstrates the use of thiol-ene-epoxy
systems for nanoimprint lithography and further shows the structuring of
high-aspect-ratio and hierarchical topologies via single-step UV-NIL. The fifth
part of the thesis introduces Micro- and NanoRIM platforms for scalable and
off-cleanroom manufacturing of microfluidic devices and nanostructuring of
materials in thiol-ene (-epoxy) systems. The sixth part of the thesis exhibits
the implementation of the noted nanofabrication methods for different
BioMEMS/NEMS applications including protein nanopatterning, simultaneous
molding and surface energy patterning, ultra-sensitive digital biosensing,
and facile quartz crystal microbalance (QCM) sensor packaging.