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Kinetics modeling of the carbon vacancy thermal equilibration in 4H-SiC
Norway.
Italy.
KTH, School of Electrical Engineering and Computer Science (EECS), Electronics, Integrated devices and circuits.ORCID iD: 0000-0002-8760-1137
Norway.
2018 (English)In: International Conference on Silicon Carbide and Related Materials, ICSCRM 2017, Trans Tech Publications, 2018, p. 233-236Conference paper, Published paper (Refereed)
Abstract [en]

The carbon vacancy (VC) is a major limiting-defect of minority carrier lifetime in n-type 4H-SiC epitaxial layers and it is readily formed during high temperature processing. In this study, a kinetics model is put forward to address the thermodynamic equilibration of VC, elucidating the possible atomistic mechanisms that control the VC equilibration under C-rich conditions. Frenkel pair generation, injection of carbon interstitials (Ci’s) from the C-rich surface, followed by recombination with VC’s, and diffusion of VC’s towards the surface appear to be the major mechanisms involved. The modelling results show a close agreement with experimental deep-level transient spectroscopy (DLTS) depth profiles of VC after annealing at different temperatures.

Place, publisher, year, edition, pages
Trans Tech Publications, 2018. p. 233-236
Keywords [en]
4H-SiC, Carbon vacancy, Diffusion, Kinetics model, Thermodynamic equilibrium, Carbon, Carrier lifetime, Deep level transient spectroscopy, Kinetics, Atomistic mechanism, High-temperature processing, Kinetics modeling, Minority carrier lifetimes, Thermal equilibrations, Thermodynamic equilibria, Silicon carbide
National Category
Metallurgy and Metallic Materials
Identifiers
URN: urn:nbn:se:kth:diva-236387DOI: 10.4028/www.scientific.net/MSF.924.233Scopus ID: 2-s2.0-85049002040ISBN: 9783035711455 (print)OAI: oai:DiVA.org:kth-236387DiVA, id: diva2:1260237
Conference
17 September 2017 through 22 September 2017
Note

QC 20181101

Available from: 2018-11-01 Created: 2018-11-01 Last updated: 2018-11-01Bibliographically approved

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Hallén, Anders

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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf