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MEMS 30 mu m-thick W-band Waveguide Switch
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
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2012 (English)In: 2012 42ND EUROPEAN MICROWAVE CONFERENCE (EUMC), IEEE , 2012, p. 1055-1058Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents for the first time a novel concept of a MEMS waveguide switch based on a reconfigurable surface, whose working principle is to short-circuit or to allow for free propagation of the electrical field lines of the TE10 mode of a WR-12 rectangular waveguide. This transmissive surface is only 30 mu m thick and consists of up to 1260 reconfiguring cantilevers in the waveguide cross-section, which are moved simultaneously by integrated MEMS comb-drive actuators. For the first fabrication run, the yield of these reconfigurable elements on the chips was 80-86%, which still was good enough for resulting in a measured insertion loss in the open state of better than 1dB and an isolation of better than 20dB for the best designs, very wideband from 62 to 75GHz. For 100% fabrication yield, HFSS simulations predict that an insertion loss in the open state of better than 0.1dB and an isolation of better than 30dB in the closed state are possible for designs with 800 and more contact points for this novel waveguide switch concept.

Place, publisher, year, edition, pages
IEEE , 2012. p. 1055-1058
Series
European Microwave Conference, ISSN 2325-0305
Keywords [en]
RF MEMS, reconfigurable surface, waveguide switch
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-245305ISI: 000325100700267ISBN: 978-2-87487-026-2 (print)OAI: oai:DiVA.org:kth-245305DiVA, id: diva2:1296188
Conference
42nd European Microwave Conference (EuMC), OCT 28-NOV 02, 2012, Amsterdam, NETHERLANDS
Note

QC 20190314

Available from: 2019-03-14 Created: 2019-03-14 Last updated: 2019-08-21Bibliographically approved

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Baghchehsaraei, ZarghamShah, UmerStemme, GöranOberhammer, Joachim

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