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Nanoelectromechanical Sensors Based on Suspended 2D Materials
Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany.;AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany..
AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany..
Univ Bundeswehr Munchen, Fac Elect Engn & Informat Technol, Inst Phys, Werner Heisenberg Weg 39, D-85577 Neubiberg, Germany..
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8811-1615
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2020 (English)In: RESEARCH, ISSN 2639-5274, Vol. 2020, article id 8748602Article, review/survey (Refereed) Published
Abstract [en]

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

Place, publisher, year, edition, pages
AMER ASSOC ADVANCEMENT SCIENCE , 2020. Vol. 2020, article id 8748602
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Condensed Matter Physics
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URN: urn:nbn:se:kth:diva-278968DOI: 10.34133/2020/8748602ISI: 000549864900001PubMedID: 32766550Scopus ID: 2-s2.0-85093357778OAI: oai:DiVA.org:kth-278968DiVA, id: diva2:1458982
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QC 20200818

Available from: 2020-08-18 Created: 2020-08-18 Last updated: 2022-06-26Bibliographically approved

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Fan, XugeNiklaus, Frank

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