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A Resonant Graphene NEMS Vibrometer
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems. Adv. Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing, 100081 China.ORCID iD: 0000-0002-8811-1615
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2022 (English)In: Small, ISSN 1613-6810, E-ISSN 1613-6829, Vol. 18, no 28, article id 2201816Article in journal (Refereed) Published
Abstract [en]

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker. 

Place, publisher, year, edition, pages
Wiley , 2022. Vol. 18, no 28, article id 2201816
Keywords [en]
graphene, laser doppler vibrometry, nano-electromechanical (NEMS), resonators, vibration, Laser Doppler velocimeters, NEMS, Vibration measurement, Building structural, Nano-electromechanical, Performance, Safety stability, Structural safety, Vibration sensors, Vibrometers, Internet of things, graphite, silicon, chemistry, equipment design, microelectromechanical system, Micro-Electrical-Mechanical Systems
National Category
Mechanical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-324157DOI: 10.1002/smll.202201816ISI: 000802927600001PubMedID: 35638191Scopus ID: 2-s2.0-85130878860OAI: oai:DiVA.org:kth-324157DiVA, id: diva2:1739681
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QC 20230227

Available from: 2023-02-27 Created: 2023-02-27 Last updated: 2023-02-27Bibliographically approved

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Fan, XugeNiklaus, Frank

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