Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Microfabrication of saw-tooth refractive x-ray lenses in low-Z materials
KTH, Superseded Departments, Physics.
2003 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 13, no 5, 714-720 p.Article in journal (Refereed) Published
Abstract [en]

Saw-tooth x-ray refractive lenses have been fabricated in silicon, epoxy and diamond. Silicon lenses were made by anisotropic wet etching of single crystalline silicon. Epoxy lenses were moulded from silicon masters. Diamond lenses were replicated by. chemical vapour deposition on silicon masters and subsequent sacrificial etching of silicon. Beryllium saw-tooth test structures were embossed using a diamond master. Silicon and epoxy lenses gave sub-micron focal lines and provided gains of up to 40 when tested in a synchrotron set-up. Focal lengths ranged from 0.33 to 0.61 m for x-ray energies between 14 and 30 keV.

Place, publisher, year, edition, pages
2003. Vol. 13, no 5, 714-720 p.
Keyword [en]
silicon, transmission, orientation, gratings, behavior
Identifiers
URN: urn:nbn:se:kth:diva-22856ISI: 000185656000025OAI: oai:DiVA.org:kth-22856DiVA: diva2:341554
Note
QC 20100525Available from: 2010-08-10 Created: 2010-08-10 Last updated: 2017-12-12Bibliographically approved

Open Access in DiVA

No full text

Search in DiVA

By author/editor
Cederström, Björn
By organisation
Physics
In the same journal
Journal of Micromechanics and Microengineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 17 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf