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Macroscopic defects in GaN/AlN multiple quantum well structures grown by MBE on GaN templates
KTH, Skolan för informations- och kommunikationsteknik (ICT), Mikroelektronik och tillämpad fysik, MAP.
KTH, Skolan för informations- och kommunikationsteknik (ICT), Mikroelektronik och tillämpad fysik, MAP.
Vise andre og tillknytning
2009 (engelsk)Inngår i: Microelectronics Journal, ISSN 0026-2692, Vol. 40, nr 2, s. 360-362Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

We have used MBE to grow in AlN/GaN superlattices, with different number of periods, on 2.5-mu m-thick MOVPE-GaN templates to study the development of defects such as surface deformation due to strain. After growth the samples were studied by atomic force microscopy (AFM), transmission electron microscopy (TEM), XRD and Fourier transform infrared spectroscopy (FT-IR). The strain increased with the number of quantum wells (QWs) and eventually caused defects such as microcracks visible by optical microscopy at four or more QW periods. High-resolution TEM images showed shallow recessions on the surface (surface deformation) indicating formation of microcracks in the MQW region. The measured intersubband (IS) absorption linewidth from a four period structure was 97 meV, which is comparable with the spectrum from a 10 period structure at an absorption energy of similar to 700 meV. This indicates that the interface quality of the MQW is not substantially affected by the presence of cracks.

sted, utgiver, år, opplag, sider
2009. Vol. 40, nr 2, s. 360-362
Emneord [en]
Intersubband, GaN, MBE, Surface cracks, Sapphire substrate, Template
HSV kategori
Identifikatorer
URN: urn:nbn:se:kth:diva-31248DOI: 10.1016/j.mejo.2008.07.065ISI: 000263695100048Scopus ID: 2-s2.0-58749106589OAI: oai:DiVA.org:kth-31248DiVA, id: diva2:405606
Merknad
QC 20110323 Symposium on Wide Band Gap Semiconductor Nanostructures for Optoelectronic Applications held at the 2008 E-MRS Conference, Strasbourg, FRANCE, MAY, 2008Tilgjengelig fra: 2011-03-23 Laget: 2011-03-11 Sist oppdatert: 2011-03-23bibliografisk kontrollert

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