Heterogeneous Integration for Optical MEMSVise andre og tillknytning
2010 (engelsk)Inngår i: 2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY, NEW YORK: IEEE , 2010, s. 487-488Konferansepaper, Publicerat paper (Fagfellevurdert)
Abstract [en]
In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various monocrystalline silicon micro-mirror arrays and infrared bolometer arrays.
sted, utgiver, år, opplag, sider
NEW YORK: IEEE , 2010. s. 487-488
Emneord [en]
MEMS, micro-opto-electromechanical system, MOEMS, More-than-Moore, photonics integration, self assembly, wafer-level heterogeneous integration, wafer-scale IC integration
HSV kategori
Identifikatorer
URN: urn:nbn:se:kth:diva-32030DOI: 10.1109/PHOTONICS.2010.5698973ISI: 000287997500244Scopus ID: 2-s2.0-79951901323ISBN: 978-1-4244-5369-6 (tryckt)OAI: oai:DiVA.org:kth-32030DiVA, id: diva2:408630
Konferanse
23rd Annual Meeting of the IEEE Photonics-Society, Denver, CO, NOV 07-11, 2010
Merknad
© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
QC 20110405
2011-11-172011-04-042024-03-18bibliografisk kontrollert