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MEMS-reconfigurable wavguide iris for switchable V-band cavity resonators
KTH, Skolan för elektro- och systemteknik (EES), Mikro- och nanosystemteknik. (RF MEMS)
KTH, Skolan för elektro- och systemteknik (EES), Mikro- och nanosystemteknik. (RF MEMS)
2014 (Engelska)Ingår i: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE , 2014, s. 206-209Konferensbidrag, Publicerat paper (Refereegranskat)
Abstract [en]

This paper presents for the first time a novel MEMS-reconfigurable inductive iris based on a 30-μm thick reconfigurable transmissive surface and reports on its application to create a switchable cavity resonator in a WR-12 rectangular waveguide (60-90 GHz). The reconfigurable surface incorporates 252 simultaneously switched contact points for activating (ON state) and deactivating (OFF state) the inductive iris by a 24 μm lateral displacement of two sets of distributed vertical cantilevers. In the ON state, these contact points are short-circuiting the electric field lines of the TE10 waveguide mode on the cross-sectional areas of a symmetric inductive waveguide iris, and are not interfering with the wave propagation in the OFF state. Thus, this novel concept allows for completely switching the inductive iris ON or OFF. The inductive iris has an insertion loss of better than 1.0 dB in the OFF state, of which 0.8 dB is attributed to the measurement setup alone. In the ON state the measured performance of the switchable iris is in good agreement with the simulation results. Furthermore, a novel, switchable cavity resonator was implemented based on such a MEMS-reconfigurable iris, and was characterized to a Q-factor of 186.13 at the resonance frequency of 68.87 GHz with the iris switched ON, and an OFF-state insertion loss of less than 2 dB (including the measurement setup) without any resonance, which is for the first time reported in this paper.

Ort, förlag, år, upplaga, sidor
IEEE , 2014. s. 206-209
Serie
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN 1084-6999
Nyckelord [en]
Cavity resonators, Electric fields, End effectors, Insertion losses, Wave propagation, Waveguides, Contact points, Cross sectional area, Electric field lines, ITS applications, Lateral displacements, Measurement setup, Reconfigurable surfaces, Resonance frequencies
Nationell ämneskategori
Annan elektroteknik och elektronik
Identifikatorer
URN: urn:nbn:se:kth:diva-143041DOI: 10.1109/MEMSYS.2014.6765611ISI: 000352217500054Scopus ID: 2-s2.0-84899002763ISBN: 978-147993508-6 (tryckt)OAI: oai:DiVA.org:kth-143041DiVA, id: diva2:705274
Konferens
27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014; San Francisco, CA; United States; 26 January 2014 through 30 January 2014
Anmärkning

QC 20140522

Tillgänglig från: 2014-03-14 Skapad: 2014-03-14 Senast uppdaterad: 2015-08-07Bibliografiskt granskad

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Av författaren/redaktören
Baghchehsaraei, ZarghamOberhammer, Joachim
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Mikro- och nanosystemteknik
Annan elektroteknik och elektronik

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