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Light-emitting nano-porous silicon structures fabricated using a plasma hydrogenation technique
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2005 (Engelska)Ingår i: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, ISSN 0921-5107, Vol. 124-125, nr SUPPL., s. 483-487Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

The preparation of porous silicon films by DC-plasma hydrogenation and subsequent annealing of amorphous silicon films on silicon and glass substrates is reported for the first time. The effects of varying plasma power and annealing temperatures have been investigated and characterized by scanning-electron microscopy, transmission-electron microscopy, and photoluminescence. A plasma density of about 5.5 W/m2 and hydrogenation-annealing temperatures of about 400 °C was found to be suitable for the formation of nano-crystalline silicon films with grain diameters of the order of 3-10 nm. The intensity and wavelength of the emitted visible light were found to depend on the hydrogenation and annealing conditions, and patterning of the silicon films using standard lithography allowed the creation of light-emitting patterns.

Ort, förlag, år, upplaga, sidor
2005. Vol. 124-125, nr SUPPL., s. 483-487
Nyckelord [en]
Hydrogenation, Nano-pores, Photoluminescence, Porous silicon, Amorphous silicon, Annealing, Glass, Light emitting diodes, Metallic films, Photolithography, Plasma applications, Scanning electron microscopy, Transmission electron microscopy, Plasma hydrogenation technique, Plasma power, Silicon films
Nationell ämneskategori
Materialteknik
Identifikatorer
URN: urn:nbn:se:kth:diva-156478DOI: 10.1016/j.mseb.2005.08.090ISI: 000233895800101Scopus ID: 2-s2.0-27844439353OAI: oai:DiVA.org:kth-156478DiVA, id: diva2:768509
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QC 20141204

Tillgänglig från: 2014-12-04 Skapad: 2014-11-28 Senast uppdaterad: 2015-10-16Bibliografiskt granskad

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Radamson, Henry H.
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Mikroelektronik och Informationsteknik, IMIT
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