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B implantation in 6H-SiC: Lattice damage recovery and implant activation upon high-temperature annealing
Valcheva, E
Paskova, T
Ivanov, I G
Yakimova, R
Wahab, Q
Savage, S
Nordell, N
ORCID iD:
0000-0002-4148-5679
Harris, C I
Show others and affiliations
1999 (English)
In:
Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 17, no 3, p. 1040-1044
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1999. Vol. 17, no 3, p. 1040-1044
National Category
Engineering and Technology
Identifiers
URN:
urn:nbn:se:kth:diva-161287
DOI:
10.1116/1.590690
ISI:
000080853100024
OAI: oai:DiVA.org:kth-161287
DiVA, id:
diva2:794731
Note
NR 20150402
Available from:
2015-03-12
Created:
2015-03-11
Last updated:
2022-06-23
Bibliographically approved
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Nordell, N
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