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Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
2015 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 40, no 15, p. 3556-3559Article in journal, Letter (Refereed) Published
Abstract [en]

We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-€“drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-€“drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -ˆ’62 €€‰pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-€“drop filters.

Place, publisher, year, edition, pages
Optical Society of America, 2015. Vol. 40, no 15, p. 3556-3559
National Category
Telecommunications
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-171433DOI: 10.1364/OL.40.003556ISI: 000358802800031Scopus ID: 2-s2.0-84943188972OAI: oai:DiVA.org:kth-171433DiVA, id: diva2:844004
Projects
VR-HET
Funder
EU, European Research Council, 267528EU, European Research Council, 277879Swedish Research Council, 621-2012-5364
Note

QC 20150811

Available from: 2015-08-03 Created: 2015-08-03 Last updated: 2018-09-14Bibliographically approved
In thesis
1. Photonic MEMS for optical information technologies
Open this publication in new window or tab >>Photonic MEMS for optical information technologies
2018 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Photonic integrated circuits (PICs) combine hundreds of optical components on a chip, and can enable fast communications, high-performance computing, and improved sensing. PICs, made by miniaturized optical waveguides, require many reconfigurable elements to enable programmable functionalities and to compensate for fabrication variations and environmental factors. However, current reconfiguration methods consume large amounts of electrical power, which is a bottleneck for their scalability, and limits their applications. A promising technology to alleviate this bottleneck is photonic microelectromechanical systems (MEMS), which provides low-power reconfiguration of PICs using electromechanical actuation. This thesis reports on several photonic MEMS devices and technologies that enable low-power reconfiguration for PICs, and bring new functionalities towards efficient nonlinear optics, optical beam steering, and photonic Lab-on-chips (LoCs). A fundamental element of reconfigurable PICs is the phase shifter, and this thesis introduces novel photonic MEMS phase shifters with low power consumption, low optical losses, and linear actuation, and applies them to reconfigurable filtering. Moreover, photonic MEMS bring novel functionalities arising from the mechanical movement of waveguide components, and, in this thesis, a method to tune waveguide dispersion for efficient nonlinear optics in silicon, and two types of reconfigurable waveguide gratings for low-power optical beam steering are developed. The photonic MEMS platform introduced in this thesis can be combined with polarization diversity schemes by using a novel suspended polarization beam splitter. In addition, other technologies addressing challenges in integrated photonics are introduced, such as a lithium niobate on insulator (LNOI) platform that combines grating couplers, high confinement waveguides, and Bragg gratings, for electro-optic modulation and efficient nonlinear optics; and a cost-efficient method to integrate photonic sensors into LoCs for healthcare applications. The technologies introduced in this thesis have potential to enable large-scale, power-efficient, and highly functional PICs, with prospects for more efficient and more functional optical information technologies.

Place, publisher, year, edition, pages
KTH Royal Institute of Technology, 2018. p. iii-xi, 79
Series
TRITA-EECS-AVL ; 2018:55
Keywords
Micro-electro-mechanical systems (MEMS), photonics, silicon photonics, photonic integrated circuits (PIC), lithium niobate photonics, ring resonator, polarization beam splitter (PBS), microfluidic integration, lab-on-chip (LoC), optical beam steering, nonlinear optics
National Category
Nano Technology Other Physics Topics
Research subject
Electrical Engineering; Physics; Materials Science and Engineering
Identifiers
urn:nbn:se:kth:diva-235069 (URN)978-91-7729-910-3 (ISBN)
Public defence
2018-10-12, M2, Brinellvägen 64, Stockholm, 10:00 (English)
Opponent
Supervisors
Projects
VR-HETMORPHIC
Funder
Swedish Research Council, 621-2012-5364EU, Horizon 2020, 780283
Note

QC 20180917

Available from: 2018-09-17 Created: 2018-09-14 Last updated: 2018-09-17Bibliographically approved

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Niklaus, FrankStemme, GöranGylfason, Kristinn B.

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