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Polymide V-groove joints for three - dimensional silicon transducers
KTH, Superseded Departments (pre-2005), Signals, Sensors and Systems.
2000 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 2000. , p. viii, 144
Series
Trita-ILA, ISSN 0281-2878 ; 0001
Identifiers
URN: urn:nbn:se:kth:diva-2978ISBN: 91-7170-568-6 (print)OAI: oai:DiVA.org:kth-2978DiVA, id: diva2:8720
Public defence
2000-05-26
Note
NR 20140805Available from: 2000-05-26 Created: 2000-05-26 Last updated: 2022-06-23Bibliographically approved

Open Access in DiVA

fulltext(2431 kB)9902 downloads
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Type fulltextMimetype application/pdf

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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
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Output format
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