The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering
2016 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 120, no 4, 044308Article in journal (Refereed) Published
Titanium oxide nanoparticles have been synthesized via sputtering of a hollow cathode in an argon atmosphere. The influence of pressure and gas flow has been studied. Changing the pressure affects the nanoparticle size, increasing approximately proportional to the pressure squared. The influence of gas flow is dependent on the pressure. In the low pressure regime (107 <= p <= 143 Pa), the nanoparticle size decreases with increasing gas flow; however, at high pressure (p = 215 Pa), the trend is reversed. For low pressures and high gas flows, it was necessary to add oxygen for the particles to nucleate. There is also a morphological transition of the nanoparticle shape that is dependent on the pressure. Shapes such as faceted, cubic, and cauliflower can be obtained. Published by AIP Publishing.
Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2016. Vol. 120, no 4, 044308
IdentifiersURN: urn:nbn:se:kth:diva-193232DOI: 10.1063/1.4959993ISI: 000382405400029ScopusID: 2-s2.0-84979986794OAI: oai:DiVA.org:kth-193232DiVA: diva2:1033063
QC 201610052016-10-052016-09-302016-10-05Bibliographically approved