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High-aspect ratio microchannels fabricated in fused silica hollow fibres using Tesla coil
KTH, School of Engineering Sciences (SCI), Applied Physics, Laser Physics.
KTH, School of Engineering Sciences (SCI), Applied Physics, Laser Physics.
KTH, School of Engineering Sciences (SCI), Applied Physics, Laser Physics.ORCID iD: 0000-0001-7688-1367
2016 (English)In: Electronics Letters, ISSN 0013-5194, E-ISSN 1350-911X, Vol. 52, no 19Article in journal (Refereed) Published
Abstract [en]

A novel method to fabricate microchannels into fused silica capillaries and hollow fibres by a high-voltage high-frequency corona discharge induced by a Tesla coil is demonstrated. Channels as narrow as 2.2 m are successfully made in capillaries with 2 m inner and 125 mu m outer diameters.

Place, publisher, year, edition, pages
Institution of Engineering and Technology, 2016. Vol. 52, no 19
Keyword [en]
silicon compounds, micro-optomechanical devices, microchannel flow, microfabrication, optical fibre fabrication, capillarity, flow control, corona, high-aspect ratio microchannels, fused silica hollow fibres, Tesla coil, fused silica capillaries, high-voltage high-frequency corona discharge, SiO2
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-193992DOI: 10.1049/el.2016.2192ISI: 000384014300026ScopusID: 2-s2.0-84986879733OAI: oai:DiVA.org:kth-193992DiVA: diva2:1038832
Funder
Swedish Research Council, 87308
Note

QC 20161020

Available from: 2016-10-20 Created: 2016-10-14 Last updated: 2016-10-20Bibliographically approved

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