High-resolution differential-interference-contrast x-ray zone plates: Design and Fabrication
2007 (English)In: Spectrochimica Acta Part B - Atomic Spectroscopy, ISSN 0584-8547, E-ISSN 0031-6987, Vol. 62, no 6-7, 539-543 p.Article in journal (Refereed) Published
Differential interference contrast is a potentially powerful technique for contrast enhancement in soft X-ray microscopy. We describe the design and fabrication of single-element diffractive optical elements suitable as objectives for high-resolution differential interference contrast microscopy in the water-window spectral range. A one-dimensional pattern calculation followed by an extension to two dimensions results in a pattern resolution of 1 nm, which is well below fabrication accuracy. The same fabrication process as for normal zone plates is applicable, but special care must be taken when converting the calculated pattern to a code for e-beam lithography.
Place, publisher, year, edition, pages
2007. Vol. 62, no 6-7, 539-543 p.
Differential interference contrast, Diffractive optics, X-ray microscopy
IdentifiersURN: urn:nbn:se:kth:diva-5986DOI: 10.1016/j.sab.2007.03.005ISI: 000249213700005ScopusID: 2-s2.0-34547643613OAI: oai:DiVA.org:kth-5986DiVA: diva2:10542
QC 201006162006-06-082006-06-082014-11-10Bibliographically approved