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Heterogeneous 3D integration of MOEMS and ICs
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0003-3452-6361
2016 (English)In: International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, 2016Conference paper, Published paper (Refereed)
Abstract [en]

Heterogeneous integration of micro-opto-electromechanical systems (MOEMS) and integrated circuits (ICs) allows the combination of high-quality optical and photonic MOEMS materials such as monocrystalline silicon (Si) with standard CMOS-based electronic circuits in order to realize complex optical systems. In this paper, we will present examples of such heterogeneous optical systems, including CMOS-integrated SiGe bolometer arrays and CMOS-integrated Si micro-mirror arrays.

Place, publisher, year, edition, pages
IEEE Computer Society, 2016.
Keyword [en]
bolometer arrays, CMOS, IC, MEMS, micro-mirror arrays, MOEMS, Wafer-level heterogeneous 3D integration, Bolometers, CMOS integrated circuits, Infrared detectors, Integrated circuits, Integration, Mirrors, Monocrystalline silicon, Nanophotonics, Silicon wafers, Three dimensional integrated circuits, 3-D integration, Bolometer array, Complex optical systems, Heterogeneous integration, Integrated circuits (ICs), Micro opto electro mechanical systems, Micromirror array, Standard CMOS
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-194853DOI: 10.1109/OMN.2016.7565909ISI: 000389586300098Scopus ID: 2-s2.0-84990173946ISBN: 9781509010356 (print)OAI: oai:DiVA.org:kth-194853DiVA: diva2:1054560
Conference
21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, 31 July 2016 through 4 August 2016
Note

QC 20161208

Available from: 2016-12-08 Created: 2016-11-01 Last updated: 2017-05-17Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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Language
  • de-DE
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More languages
Output format
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