THz MEMS - Micromachining enabling new solutions at millimeter and submillimeter frequencies
2016 (English)In: 2016 Global Symposium on Millimeter Waves, GSMM 2016 and ESA Workshop on Millimetre-Wave Technology and Applications, IEEE conference proceedings, 2016Conference paper (Refereed)
Since RF MEMS switches appeared more than 20 years ago, micromechanics has been attracting huge attention for enabling near-ideal microwave devices. MEMS switches and MEMS-switch based circuits have been through different development stages and are currently proving themselves commercially, among others for mobile-phone antenna tuners. However, micromachining can do much more than just two-dimensional MEMS switches for planar transmission-line technology: Three-dimensional micromachining allows for new microwave devices with unprecedented performance, and has the potential to become an enabling technology for volume-manufacturable, reconfigurable submillimeter-wave and THz systems. This paper provides an overview of 3D silicon micromachining capability and examples of innovative microwave devices enabled by this technique, including W-band phase shifters, tuneable capacitors and couplers, and near-ideal V-band waveguide switches based on MEMS-tuneable surfaces. Then, the state of the art of micromachined waveguide systems up to 2.9 THz is given, including single components such as micromachined-waveguide filters up to 1 THz, but also very complex systems such as a 340 GHz 8-pixel imaging radar. Finally, the potential of MEMS-tuneable micromachined-waveguide systems is outlined, given the examples of recent work at KTH on THz MEMS devices operating at 500-750 GHz, including a 3.3 bit MEMS phase shifter and a waveguide switch.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2016.
MEMS, micromachining, phase shifter, RF MEMS, submillimeter-wave, terahertz, THz, waveguide switch, Composite micromechanics, Electric switches, Microwave devices, Millimeter waves, Mobile antennas, Phase shifters, Reconfigurable hardware, Submillimeter waves, Terahertz waves, Waveguides, Development stages, Enabling technologies, Mobile-phone antennas, Planar transmission lines, RF-MEMS, Tera Hertz, Three-dimensional micromachining, Wave-guide switch, Waveguide filters
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-197204DOI: 10.1109/GSMM.2016.7500284ISI: 000389825200001ScopusID: 2-s2.0-84979608988ISBN: 9781509013487OAI: oai:DiVA.org:kth-197204DiVA: diva2:1055395
2016 Global Symposium on Millimeter Waves, GSMM 2016 and ESA Workshop on Millimetre-Wave Technology and Applications, 6 June 2016 through 8 June 2016
QC 201612122016-12-122016-11-302017-01-24Bibliographically approved