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Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
KTH, School of Information and Communication Technology (ICT).ORCID iD: 0000-0003-4637-8001
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-8853-0967
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2016 (English)In: ACS Nano, ISSN 1936-0851, E-ISSN 1936-086X, Vol. 10, no 11, 9879-9886 p.Article in journal (Refereed) Published
Abstract [en]

Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene. Here, we report experimental and theoretical data on the uni- and biaxial piezoresistive properties of suspended graphene membranes applied to piezoresistive pressure sensors. A detailed model that utilizes a linearized Boltzman transport equation describes accurately the charge-carrier density and mobility in strained graphene and, hence, the gauge factor. The gauge factor is found to be practically independent of the doping concentration and crystallographic orientation of the graphene films. These investigations provide deeper insight into the piezoresistive behavior of graphene membranes.

Place, publisher, year, edition, pages
American Chemical Society (ACS), 2016. Vol. 10, no 11, 9879-9886 p.
Keyword [en]
graphene, nanoelectromechanical system, NEMS, MEMS, strain gauge, transducer, piezoresistive transduction, gauge factor, pressure transducer, (suspended) graphene membranes, uniaxial and biaxial strain
National Category
Other Engineering and Technologies
Identifiers
URN: urn:nbn:se:kth:diva-198888DOI: 10.1021/acsnano.6b02533ISI: 000388913100016Scopus ID: 2-s2.0-84997235109OAI: oai:DiVA.org:kth-198888DiVA: diva2:1063091
Funder
EU, European Research Council, 307311 277879Swedish Research Council, E0616001 D0575901 2015-05112
Note

QC 20170109

Available from: 2017-01-09 Created: 2016-12-22 Last updated: 2017-01-09Bibliographically approved

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Smith, Anderson DavidNiklaus, FrankSchröder, StephanFischer, Andreas C.Sterner, MikaelVaziri, SamForsberg, FredrikÖstling, MikaelLemme, Max C.
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