Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
2016 (English)In: ACS Nano, ISSN 1936-0851, E-ISSN 1936-086X, Vol. 10, no 11, 9879-9886 p.Article in journal (Refereed) Published
Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene. Here, we report experimental and theoretical data on the uni- and biaxial piezoresistive properties of suspended graphene membranes applied to piezoresistive pressure sensors. A detailed model that utilizes a linearized Boltzman transport equation describes accurately the charge-carrier density and mobility in strained graphene and, hence, the gauge factor. The gauge factor is found to be practically independent of the doping concentration and crystallographic orientation of the graphene films. These investigations provide deeper insight into the piezoresistive behavior of graphene membranes.
Place, publisher, year, edition, pages
American Chemical Society (ACS), 2016. Vol. 10, no 11, 9879-9886 p.
graphene, nanoelectromechanical system, NEMS, MEMS, strain gauge, transducer, piezoresistive transduction, gauge factor, pressure transducer, (suspended) graphene membranes, uniaxial and biaxial strain
Other Engineering and Technologies
IdentifiersURN: urn:nbn:se:kth:diva-198888DOI: 10.1021/acsnano.6b02533ISI: 000388913100016ScopusID: 2-s2.0-84997235109OAI: oai:DiVA.org:kth-198888DiVA: diva2:1063091
FunderEU, European Research Council, 307311 277879Swedish Research Council, E0616001 D0575901 2015-05112
QC 201701092017-01-092016-12-222017-01-09Bibliographically approved