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RF MEMS in Competition with Semiconductor Technology
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)ORCID iD: 0000-0002-8264-3231
2015 (English)In: 2015 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), IEEE conference proceedings, 2015Conference paper, Oral presentation with published abstract (Other academic)
Abstract [en]

This talk will give an overview on radio-frequency microelectromechanical systems (RF MEMS), its current state of development and performance, and comparison between commercial RF MEMS products and its semiconductor technology competition, in particular for reconfigurable RF front-ends. Furthermore, the presentation also gives an outline into emerging fields in RF/microwave engineering which are enabled by MEMS technologies, including reconfigurable millimeter and submillimeter-wave microsystems.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2015.
Keywords [en]
submillimetre wave devices, micromechanical devices, semiconductor technology
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-199965DOI: 10.1109/VLSI-TSA.2015.7117597ISBN: 978-1-4799-7375-0 (electronic)ISBN: 978-1-4799-7376-7 (print)OAI: oai:DiVA.org:kth-199965DiVA, id: diva2:1067145
Conference
22nd International Symposium on VLSI Technology, Systems and Applications (2015 VLSI-TSA), 27-29 April 2015
Note

QC 20170120

Available from: 2017-01-20 Created: 2017-01-20 Last updated: 2017-03-21Bibliographically approved

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