Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
The current waveform in reactive high power impulse magnetron sputtering
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.ORCID iD: 0000-0002-8153-3209
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.
Show others and affiliations
2016 (English)In: 2016 IEEE International Conference on Plasma Science (ICOPS), Institute of Electrical and Electronics Engineers (IEEE), 2016Conference paper, Published paper (Refereed)
Abstract [en]

Summary form only given. The understanding of the current waveform for the non-reactive HiPIMS discharge is now rather well established [1,2]. It is described by a rise in the current to an initial peak and then a drop followed by a stable plateau. The drop is a result of a strong gas compression due to the sudden large flux of atoms from the target. For the reactive HiPIMS discharge striking differences are observed and those seem to depend on the mode of operation, the reactive gas and the target material. The discharge current waveform changes in shape as well as in the peak value when the target surface enters the poisoned mode. For Ar/O2 discharge with Ti target the discharge current waveform varies with oxygen partial pressure and pulse repetition frequency [3]. For the higher repetition frequencies the familiar nonreactive current waveform is observed. As the repetition frequency is lowered there is an increase in the current which transits into a different waveform as the repetition frequency is decreased further. The waveform observed at low repetition frequency is similar to the one observed at high reactive gas flow rate. Similarly, the current waveform in the reactive Ar/N2 HiPIMS discharge with Ti target is highly dependent on the pulse repetition frequency and the current is found to increase significantly as the frequency is lowered [4]. However, the discharge current keeps its shape and it remains as for the non-reactive case as the current increases. These findings will be compared with results for various combinations of gas mixtures and targets found in the literature [5]. Furthermore, we explore the current waveform in reactive HiPIMS using the ionization region model (IRM) [6] of the reactive Ar/O2 discharge with a Ti target. We discuss the current waveform development and how the discharge composition varies between metal and poisoned mode.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2016.
Keywords [en]
Ar-O2, discharge current waveform, poisoned mode, Ar-oxygen discharge, oxygen partial pressure, pulse repetition frequency, nonreactive current waveform, reactive gas flow rate, gas mixtures, ionization region model, discharge composition, gas compression, reactive high power impulse magnetron sputtering discharge
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-200422DOI: 10.1109/PLASMA.2016.7534328ISI: 000391073600391ISBN: 978-1-4673-9601-1 (electronic)OAI: oai:DiVA.org:kth-200422DiVA, id: diva2:1070847
Conference
43rd IEEE International Conference on Plasma Science (ICOPS), JUN 19-23, 2016, Banff, Canada
Note

QC 20170202

Available from: 2017-02-02 Created: 2017-01-27 Last updated: 2017-02-02Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full text

Search in DiVA

By author/editor
Gudmundsson, Jon TomasRaadu, Michael A.Brenning, Nils
By organisation
Space and Plasma Physics
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 38 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf