Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
The role of the singlet metastables in capacitively coupled oxygen discharges
KTH, School of Electrical Engineering (EES), Space and Plasma Physics. University of Iceland, Iceland.ORCID iD: 0000-0002-8153-3209
2016 (English)In: 2016 IEEE International Conference on Plasma Science (ICOPS), Institute of Electrical and Electronics Engineers (IEEE), 2016Conference paper, Published paper (Refereed)
Abstract [en]

 Summary form only given. We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to study the evolution of the charged particle density profiles, electron heating mechanism, effective electron temperature, and the electron energy probability function (EEPF) in a capacitively coupled oxygen discharge with pressure in the pressure range of 10-500 mTorr. We find that at higher pressure (50-500 mTorr) the electron heating occurs mainly in the sheath region, and detachment by the metastable singlet molecule O2(b1Δg) has a significant influence on the electron heating process and the EEPF [1,2]. At a low pressure (10 mTorr), Ohmic heating in the bulk plasma (the electronegative core) dominates, and detachment by O2(b1Δg) has only a small influence on the heating process. Thus at low pressure, the EEPF is convex and as the pressure is increased the number of low energy electrons increases and the number of higher energy electrons (>10 eV) decreases, and the EEPF develops a concave shape or becomes bi-Maxwellian [2]. Furthermore, we explore the effects of including the singlet metastable molecule O2(b1Σg) and energy-dependent secondary electron emission yields at the electrodes in a capacitively coupled single frequency rf driven oxygen discharge. We find that including the metastable O2(b1Δg) further decreases the Ohmic heating in the bulk region at higher pressures. Moreover, we find that including an energy-dependent secondary electron emission yield for O2+-ions has a significant influence on the discharge properties while the energy dependent secondary electron emission coefficient due to O+-ions and the neutrals has only marginal influence on the discharge properties.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2016.
Keywords [en]
O2+, O2+-ions, secondary electron emission, concave shape, bulk plasma, Ohmic heating, metastable singlet molecule, sheath region, EEPF, electron energy probability function, effective electron temperature, electron heating mechanism, charged particle density profiles, oopd1, 1D object-oriented particle-in-cell Monte Carlo collision code, capacitively coupled oxygen discharges, singlet metastables
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-200423DOI: 10.1109/PLASMA.2016.7534331ISI: 000391073600394ISBN: 978-1-4673-9601-1 (print)OAI: oai:DiVA.org:kth-200423DiVA, id: diva2:1070864
Conference
43rd IEEE International Conference on Plasma Science (ICOPS), JUN 19-23, 2016, Banff, Canada
Note

QC 20170202

Available from: 2017-02-02 Created: 2017-01-27 Last updated: 2017-02-02Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full text

Search in DiVA

By author/editor
Gudmundsson, Jon Tomas
By organisation
Space and Plasma Physics
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 12 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf