High-reflectivity Cr/Sc multilayer condenser for compact soft x-ray microscopy
2006 (English)In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 77, no 12, 123101- p.Article in journal (Refereed) Published
The condenser is a critical component in compact water-window x-ray microscopes as it influences the exposure time via its efficiency and the resolution via its numerical aperture. Normal-incidence multilayer mirrors can reach large geometrical collection efficiencies and match the numerical aperture of the zone plate but require advanced processing for high total reflectivity. In the present article we demonstrate large-diameter normal-incidence spherical Cr/Sc multilayer condensers with high and uniform reflectivity. Dc-magnetron sputtering was used to deposit 300 bilayers of Cr/Sc with a predetermined d-spacing matching the lambda=3.374 nm operating wavelength on spherical substrates. The mirrors show a uniform reflectivity of similar to 3% over the full 58 mm diameter condenser area. With these mirrors an improvement in exposure time by a factor of 10 was achieved, thereby improving the performance of the compact x-ray microscope significantly.
Place, publisher, year, edition, pages
2006. Vol. 77, no 12, 123101- p.
Chromium compounds; Magnetron sputtering; Multilayers; Numerical analysis; Optical microscopy; Reflection; d-spacing matching; Multilayer mirrors; Water-window x-ray microscopes; Capacitors
IdentifiersURN: urn:nbn:se:kth:diva-6202DOI: 10.1063/1.2400665ISI: 000243159100001ScopusID: 2-s2.0-33846081459OAI: oai:DiVA.org:kth-6202DiVA: diva2:10846
QC 20100820. Uppdaterad från Submitted till Published 20100820.2006-10-032006-10-032010-08-20Bibliographically approved