Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Noninvasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization
Show others and affiliations
2017 (English)In: Nano letters (Print), ISSN 1530-6984, E-ISSN 1530-6992, Vol. 17, no 3, 1504-1511 p.Article in journal (Refereed) Published
Abstract [en]

Graphene has extraordinary mechanical and electronic properties, making it a promising material for membrane based nanoelectromechanical systems (NEMS). Here, chemical-vapor-deposited graphene is transferred onto target substrates to suspend it over cavities and trenches for pressure-sensor applications. The development of such devices requires suitable metrology methods, i.e., large-scale characterization techniques, to confirm and analyze successful graphene transfer with intact suspended graphene membranes. We propose fast and noninvasive Raman spectroscopy mapping to distinguish between freestanding and substrate-supported graphene, utilizing the different strain and doping levels. The technique is expanded to combine two-dimensional area scans with cross-sectional Raman spectroscopy, resulting in three-dimensional Raman tomography of membrane-based graphene NEMS. The potential of Raman tomography for in-line monitoring is further demonstrated with a methodology for automated data analysis to spatially resolve the material composition in micrometer-scale integrated devices, including free-standing and substrate-supported graphene. Raman tomography may be applied to devices composed of other two-dimensional materials as well as silicon micro- and nanoelectromechanical systems.

Place, publisher, year, edition, pages
American Chemical Society (ACS), 2017. Vol. 17, no 3, 1504-1511 p.
Keyword [en]
Raman spectroscopy, Raman tomography, suspended graphene, noninvasive, strain, doping, nanoelectromechanical systems, NEMS, MEMS, 2D materials
National Category
Computer and Information Science
Identifiers
URN: urn:nbn:se:kth:diva-204070DOI: 10.1021/acs.nanolett.6b04546ISI: 000396185800027PubMedID: 28140595Scopus ID: 2-s2.0-85014955224OAI: oai:DiVA.org:kth-204070DiVA: diva2:1085514
Note

QC 20170329

Available from: 2017-03-29 Created: 2017-03-29 Last updated: 2017-03-29Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textPubMedScopus

Search in DiVA

By author/editor
Smith, Anderson D.
By organisation
School of Information and Communication Technology (ICT)
In the same journal
Nano letters (Print)
Computer and Information Science

Search outside of DiVA

GoogleGoogle Scholar

Altmetric score

Total: 3 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf