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On the role of metastable states in low pressure oxygen discharges
KTH, School of Electrical Engineering (EES), Space and Plasma Physics. University of Iceland, Iceland.ORCID iD: 0000-0002-8153-3209
2017 (English)In: AIP Conference Proceedings, American Institute of Physics (AIP), 2017, Vol. 1811, 120001Conference paper, Published paper (Refereed)
Abstract [en]

We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to explore the spatio-temporal evolution of the electron heating mechanism in a capacitively coupled oxygen discharge in the pressure range 10 – 200 mTorr. The electron heating is most significant in the sheath vicinity during the sheath expansion phase. We explore how including and excluding detachment by the singlet metastable states O2(a1 Δg) and O2(b1Σ+g) influences the heating mechanism, the effective electron temperature and electronegativity, in the oxygen discharge. We demonstrate that the detachment processes have a significant influence on the discharge properties, in particular for the higher pressures. At 10 mTorr the time averaged electron heating shows mainly ohmic heating in the plasma bulk (the electronegative core) and at higher pressures there is no ohmic heating in the plasma bulk, that is electron heating in the sheath regions dominates.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2017. Vol. 1811, 120001
National Category
Physical Sciences
Research subject
Physics
Identifiers
URN: urn:nbn:se:kth:diva-204669DOI: 10.1063/1.4975734Scopus ID: 2-s2.0-85016975357OAI: oai:DiVA.org:kth-204669DiVA: diva2:1085978
Conference
ATOMIC PROCESSES IN PLASMAS APIP 2016: Proceedings of the 18th and 19th International Conference on Atomic Processes in Plasmas, 4–8 April 2016, Paris, France
Funder
VINNOVA, 2014-04876
Note

QC 20170407

Available from: 2017-03-30 Created: 2017-03-30 Last updated: 2017-04-07Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
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  • de-DE
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