Ion Energy and Angular Distributions in a Dual-frequency Capacitively Coupled Chlorine Discharge
2014 (English)In: IEEE Transactions on Plasma Science, ISSN 0093-3813, E-ISSN 1939-9375, Vol. 42, no 10, 2854-2855 p.Article in journal (Refereed) Published
Ion energy distributions (IEDs) and ion angular distributions (IADs) of Cl2 + and Cl+ ions in a dual-frequency capacitively coupled chlorine discharge are obtained through a particle-in-cell/Monte Carlo simulation. Since the ion transit time is less than the low-frequency period, the ions respond to the instantaneous electric field in the sheath region, which leads to bimodal IEDs for Cl2 + and Cl+ ions. When transiting the sheath, the Cl+ ions experience a more collisional sheath than the Cl2 + ions. The IADs of Cl2 + and Cl+ ions at the surface are almost anisotropic. However, a secondary peak is found in the IAD of Cl+ ions, which can be ascribed to dissociative ionization reactions.
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2014. Vol. 42, no 10, 2854-2855 p.
IdentifiersURN: urn:nbn:se:kth:diva-204672DOI: 10.1109/TPS.2014.2323816ISI: 000344548300265ScopusID: 2-s2.0-84908453599OAI: oai:DiVA.org:kth-204672DiVA: diva2:1085985
QC 201704072017-03-302017-03-302017-04-07Bibliographically approved