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The Ion Energy Distribution in a Planar Inductive Oxygen Discharge
(University of Iceland, Iceland)ORCID iD: 0000-0002-8153-3209
1999 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 32, no 7, 798-803 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1999. Vol. 32, no 7, 798-803 p.
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Natural Sciences
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Physics
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URN: urn:nbn:se:kth:diva-204856OAI: oai:DiVA.org:kth-204856DiVA: diva2:1086304
Note

QC 20170407

Available from: 2017-03-31 Created: 2017-03-31 Last updated: 2017-04-07Bibliographically approved

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http://iopscience.iop.org/0022-3727/32/7/008

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Gudmundsson, Jon Tomas
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