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Spatial and Temporal Behavior of the Plasma Parameters in a Pulsed Magnetron Discharge
University of Iceland.ORCID iD: 0000-0002-8153-3209
Linköping University.
Linköping University.
2002 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 161, no 2-3, 249-256 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
Elsevier, 2002. Vol. 161, no 2-3, 249-256 p.
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Physical Sciences
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URN: urn:nbn:se:kth:diva-205385DOI: 10.1016/S0257-8972(02)00518-2ISI: 000178695400021Scopus ID: 2-s2.0-0037010581OAI: oai:DiVA.org:kth-205385DiVA: diva2:1088797
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QC 20170502

Available from: 2017-04-15 Created: 2017-04-15 Last updated: 2017-05-02Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
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