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Evolution of the electron energy distribution and the plasma parameters in a pulsed magnetron discharge
University of Iceland.ORCID iD: 0000-0002-8153-3209
Linköping University.
Linköping University.
2001 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 78, 3427-3429 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2001. Vol. 78, 3427-3429 p.
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Engineering and Technology
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URN: urn:nbn:se:kth:diva-205387DOI: 10.1063/1.1376150OAI: oai:DiVA.org:kth-205387DiVA: diva2:1088799
Available from: 2017-04-15 Created: 2017-04-15 Last updated: 2017-04-15

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Gudmundsson, Jon Tomas
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  • apa
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