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Mems
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0003-3452-6361
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2015 (English)Patent (Other (popular science, discussion, etc.))
Abstract [en]

Embodiments provide a MEMS including a MEMS device and an detector circuit. The MEMS device includes a membrane, wherein a material of the membrane comprises a band gap and a crystal structure with structural elements (unit cells) connected by covalent bonds in two dimensions only. The detector circuit is configured to determine a deformation of the membrane based on a piezoresistive resistance of the material of the membrane.

Place, publisher, year, edition, pages
2015.
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-206190OAI: oai:DiVA.org:kth-206190DiVA, id: diva2:1091751
Patent
US US20150090043 A1
Note

QC 20170519

Available from: 2017-04-27 Created: 2017-04-27 Last updated: 2017-05-19Bibliographically approved

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Fischer, Andreas C.Niklaus, Frank
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