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Rapid manufacturing of OSTE polymer RF-MEMS components
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. KTH, School of Biotechnology (BIO), Proteomics and Nanobiotechnology. KTH, Centres, Science for Life Laboratory, SciLifeLab.ORCID iD: 0000-0001-8531-5607
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-8248-6670
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2017 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, 2017, 901-904 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor.

Place, publisher, year, edition, pages
IEEE, 2017. 901-904 p.
Keyword [en]
Aspect ratio, Gold, Gold coatings, Mechanics, Polymers, Q factor measurement, Resonators, Device performance, Fabrication process, High aspect ratio, Q-factors, Rapid manufacturing, RF-MEMS, Si-based, MEMS
National Category
Textile, Rubber and Polymeric Materials
Identifiers
URN: urn:nbn:se:kth:diva-207992DOI: 10.1109/MEMSYS.2017.7863554ISI: 000402552000231Scopus ID: 2-s2.0-85015753569ISBN: 9781509050789 (print)OAI: oai:DiVA.org:kth-207992DiVA: diva2:1106437
Conference
30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, 22 January 2017 through 26 January 2017
Note

QC 20170607

Available from: 2017-06-07 Created: 2017-06-07 Last updated: 2017-11-10Bibliographically approved

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Publisher's full textScopushttp://www.mems17.org/

Authority records BETA

Hansson, Jonasvan der Wijngaart, WouterHaraldsson, Klas TommyHaasl, Sjoerd

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Hansson, Jonasvan der Wijngaart, WouterHaraldsson, Klas TommyHaasl, Sjoerd
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Micro and NanosystemsProteomics and NanobiotechnologyScience for Life Laboratory, SciLifeLabFibre and Polymer TechnologyCentre for Technology in Medicine and Health, CTMH
Textile, Rubber and Polymeric Materials

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