Rapid manufacturing of OSTE polymer RF-MEMS componentsShow others and affiliations
2017 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, 2017, p. 901-904Conference paper, Published paper (Refereed)
Abstract [en]
This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor.
Place, publisher, year, edition, pages
IEEE, 2017. p. 901-904
Keyword [en]
Aspect ratio, Gold, Gold coatings, Mechanics, Polymers, Q factor measurement, Resonators, Device performance, Fabrication process, High aspect ratio, Q-factors, Rapid manufacturing, RF-MEMS, Si-based, MEMS
National Category
Textile, Rubber and Polymeric Materials
Identifiers
URN: urn:nbn:se:kth:diva-207992ISI: 000402552000231Scopus ID: 2-s2.0-85015753569ISBN: 9781509050789 (print)OAI: oai:DiVA.org:kth-207992DiVA, id: diva2:1106437
Conference
30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, 22 January 2017 through 26 January 2017
Note
QC 20170607
2017-06-072017-06-072017-11-29Bibliographically approved