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Interferometric characterization of rotation stages for X-ray nanotomography
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2017 (English)In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 88, no 5, 053703Article in journal (Refereed) Published
Abstract [en]

The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based on multi-probe error separation using fiber-laser interferometry and uses a standard cylindrical sample holder as a reference. The obtained runout and shape measurements are then used to perform the position corrections using additional drives. We demonstrate the results of the characterization for a piezo-driven small rotation stage. The error separation allowed us to measure the axis runout to be approximately +/-1.25 mu m, and with active runout compensation this could be reduced down to +/-42 nm.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2017. Vol. 88, no 5, 053703
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-210504DOI: 10.1063/1.4983405ISI: 000402801900036PubMedID: 28571450Scopus ID: 2-s2.0-85019598560OAI: oai:DiVA.org:kth-210504DiVA: diva2:1119624
Funder
Swedish Research Council
Note

QC 20170704

Available from: 2017-07-04 Created: 2017-07-04 Last updated: 2017-07-04Bibliographically approved

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Vogt, Ulrich
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CiteExportLink to record
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Citation style
  • apa
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