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High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface
KTH, School of Industrial Engineering and Management (ITM), Production Engineering.
2017 (English)In: Proceedings - ASPE 2017 Spring Topical Meeting - Precision Engineering and Optics: What are the Limits of Precision, and How to Characterize Them?, American Society for Precision Engineering, ASPE , 2017, 84-89 p.Conference paper (Refereed)
Place, publisher, year, edition, pages
American Society for Precision Engineering, ASPE , 2017. 84-89 p.
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Other Engineering and Technologies
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URN: urn:nbn:se:kth:diva-211899Scopus ID: 2-s2.0-85021454793ISBN: 9781887706735 OAI: oai:DiVA.org:kth-211899DiVA: diva2:1131689
Conference
2017 Spring Topical Meeting on Precision Engineering and Optics: What are the Limits of Precision, and How to Characterize Them?, Westward Look Wyndham Grand Resort and SpaTucson, United States, 24 April 2017 through 25 April 2017
Note

QC 20170815

Available from: 2017-08-15 Created: 2017-08-15 Last updated: 2017-08-15Bibliographically approved

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CiteExportLink to record
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  • apa
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