Processing and on-wafer test of ferroelectric film microwave varactors
2006 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Applied physics letters, Vol. 88, no 19, 192905- p.Article in journal (Refereed) Published
We present comparative characteristics of microwave variable capacitors (varactors) fabricated on Na0.5K0.5NbO3 (NKN), AgTa0.5Nb0.5O3 (ATN), and Ba0.5Sr0.5TiO3 (BST) ferroelectric films grown by rf-magnetron sputtering (NKN) and pulsed laser deposition (ATN and BST) techniques on the sapphire. Two port 2 mu m finger gap coplanar waveguide interdigital capacitors (CPWIDCs) were defined on ferroelectric films surface by photolithographic lift-off technique. Deembedding method was employed to extract properties of CPWIDC from the S parameters measured in microwave range up to 40 GHz. BST films on sapphire substrates show superior tunability of 26% (20 GHz, 200 kV/cm), whereas ATN films possess the lowest tan delta=0.06 at 20 GHz and extremely low dispersion of 4.3% in a whole frequency range of 45 MHz-40 GHz.
Place, publisher, year, edition, pages
2006. Vol. 88, no 19, 192905- p.
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-6578DOI: 10.1063/1.2202748ISI: 000237477400070ScopusID: 2-s2.0-33646710366OAI: oai:DiVA.org:kth-6578DiVA: diva2:11328
QC 201009062006-12-122006-12-122011-11-08Bibliographically approved