Microwave properties of AgTa0.5Nb0.5O3 thin film varactors on various substrates
2007 (English)In: 2006 15TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, New York: IEEE , 2007, 363-366 p.Conference paper (Refereed)
400nm thick AgTa0.5Nb0.5O3 (ATN) films have been sintered by pulsed laser deposition technique on LaAlO3 (001), sapphire (Al2O3-01 (1) under bar2, r-cut) single crystal substrates and Coming 7059 Glass. Photolithography and metal lift-off technique were used to fabricate tunable Coplanar Waveguide Interdigital Capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAlO3 capacitors demonstrated the highest tunability (similar to 5.8%@20GHz), ATN/Glass showed the best flat dispersion (similar to 3.9%) and ATN/ Al2O3 showed the lowest loss tangent (similar to 0.06@20GHz) in the microwave range from 1 to 40 GHz.
Place, publisher, year, edition, pages
New York: IEEE , 2007. 363-366 p.
, IEEE International Symposium on Applications of Ferroelectrics, ISSN 1099-4734
Ceramic thin film, Coplanar waveguides, Scattering parameters, Voltage tunable devices
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-6579ISI: 000262360900088ISBN: 978-1-4244-1331-7OAI: oai:DiVA.org:kth-6579DiVA: diva2:11329
15th IEEE International Symposium on Applications of Ferroelectrics Sunset Beach, NC, JUL 30-AUG 03, 2006 IEEE
QC 201009062006-12-122006-12-122011-04-04Bibliographically approved