AgTa0.5Nb0.5O3 thin film coplanar waveguide microwave capacitors
2005 (English)In: Integrated Ferroelectrics, ISSN 1058-4587, Vol. 77, 13-20 p.Article in journal (Refereed) Published
400 nm thick AgTa0.5Nb0.5O3 (ATN) films have been prepared by pulsed laser depositiontechnique on LaAlO3 (001) and sapphire (Al2O3-0112, r -cut) single crystal substrates.Comprehensive X-ray diffraction analysis showed epitaxial quality of ATN/LaAlO3films and preferentially (001) orientation of ATN/Al2O3 films. Voltage tunable microwavecapacitors were fabricated by lift-off technique on the surface of ferroelectricfilms. Microwave on-wafer tests were performed in the range from 1 to 40 GHz. Frequencydispersion is about 4.3%, voltage tunability is 4.7% @ 20 GHz and 200 kV/cm,loss tangent ∼0.068 @ 20 GHz, K-factor=tunability/tanδ is ranged from 124% @10 GHz to 35% @ 40 GHz.
Place, publisher, year, edition, pages
2005. Vol. 77, 13-20 p.
Coplanar waveguide, microwave on-wafer test, photolithography, pulsed laser deposition, scatering parameter measurements, ferroelectric thin films, silver tantalate niobates, voltage tunable device
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-6583DOI: 10.1080/10584580500413624ISI: 000234386100003ScopusID: 2-s2.0-33645505627OAI: oai:DiVA.org:kth-6583DiVA: diva2:11333
QC 201009062006-12-122006-12-122010-12-07Bibliographically approved